公开(公告)号：US20230356999A1

公开(公告)日：2023-11-09

申请号：US18308562

申请日：2023-04-27

Applicant: STMICROELECTRONICS S.r.l.

Inventor： Filippo DANIELE ,  Lorenzo BALDO ,  Davide MAERNA ,  Enri DUQI

IPC: B81B7/00

CPC classification number: B81B7/0048 ,  B81B7/008

Abstract: A microelectromechanical device includes a support structure, a microelectromechanical system die, incorporating a microstructure and a connection structure between the microelectromechanical system die and the support structure. The connection structure includes a spacer structure, joined to the support structure, and a film applied to one face of the spacer structure opposite to the support structure. The spacer structure laterally delimits at least in part a cavity and the film extends on the cavity, at a distance from the support structure. The microelectromechanical system die is joined to the film on the cavity.

公开(公告)号：US20220410183A1

公开(公告)日：2022-12-29

申请号：US17845718

申请日：2022-06-21

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Domenico GIUSTI ,  Gianluca GULLI' ,  Francesco FERRARIO ,  Davide MAERNA ,  Lorenzo TENTORI

IPC: B05B1/08 ,  B05B1/24 ,  B05B1/14

Abstract: A microfluidic device has a chamber; a fluidic access channel in fluidic connection with the chamber; a plurality of nozzle apertures in fluidic connection with the chamber; and an actuator, operatively coupled to the fluid containment chamber and configured to cause ejection of drops of fluid through the nozzle apertures in an operating condition of the microfluidic device. The chamber has an elongated shape, with a length and a maximum width, wherein an aspect ratio between the length and the maximum width of the chamber is at least 3:1. The nozzle apertures are configured to generate, in use, a plurality of drops having a total drop volume, wherein a ratio total drop volume to a chamber volume is at least 15%.