公开(公告)号：US11251053B2

公开(公告)日：2022-02-15

申请号：US16990556

申请日：2020-08-11

Applicant: STMicroelectronics (Crolles 2) SAS

Inventor： Joel Schmitt ,  Bilel Saidi ,  Sylvain Joblot

IPC: H01L21/00 ,  H01L21/3205 ,  H01L21/285 ,  H01L21/321 ,  H01L21/3215 ,  H01L23/528

Abstract: An electrode is included in a base substrate. A trench is produced in the base substrate. The trench is filled with an annealed amorphous material to form the electrode. The electrode is made of a crystallized material which includes particles that are implanted into a portion of the electrode that is located adjacent the front-face side of the base substrate.