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公开(公告)号:US20250107121A1
公开(公告)日:2025-03-27
申请号:US18889098
申请日:2024-09-18
Applicant: STMicroelectronics International N.V.
Inventor: Gabriele BELLOCCHI , Simone RASCUNÁ , Valeria PUGLISI , Paolo BADALÁ
IPC: H01L29/872 , H01L21/04 , H01L29/16 , H01L29/47 , H01L29/66
Abstract: Method of forming a metal-semiconductor contact, comprising the steps of: forming, on a semiconductor body having a first electrical conductivity, a first metal layer; performing a thermal treatment of at least a portion of the first metal layer by a LASER beam having an incidence direction on the first metal layer, including heating the portion of the first metal layer, along said incidence direction, at a temperature between 1500° C. and 3000° C.