公开(公告)号：US20140283605A1

公开(公告)日：2014-09-25

申请号：US14220979

申请日：2014-03-20

Applicant: STMicroelectronics S.r.I.

Inventor： Leonardo Baldasarre ,  Alessandro Tocchio ,  Sarah Zerbini

IPC: G01P15/125

CPC classification number: G01P15/125 ,  G01P2015/0831 ,  G01P2015/0837

Abstract: A z-axis micro-electro-mechanical detection structure, having a substrate defining a plane and a suspended mass carried by two anchorage elements. The suspended mass includes a translating mass, suspended over the substrate, mobile in a transverse direction to the plane and arranged between the anchorage elements and two tilting masses, each of which is supported by the anchorage elements through respective elastic anchorage elements so as to be able to rotate with respect to respective oscillation axes. The oscillation axes are parallel to each other to enable a translation movement of the translating mass. Fixed electrodes face at a distance the tilting masses or the translating mass so as to be able to detect displacement of the suspended mass as a result of external forces. Elastic supporting elements are arranged between the translating mass and the tilting masses to enable relative rotation between the translating mass and the tilting masses.

Abstract translation: z轴微电子机械检测结构，其具有限定平面的基板和由两个锚固元件承载的悬架。 悬挂质量包括悬浮在基板上的平移质量块，在横向方向移动到平面并且布置在锚固元件和两个倾斜块之间，每个倾斜块通过相应的弹性锚固元件由锚固元件支撑，以便是 能够相对于各个摆动轴线旋转。 振荡轴线彼此平行，以便平移质量的平移运动。 固定电极面对倾斜质量或平移质量的距离，以便能够检测由于外力而导致的悬浮质量的位移。 弹性支撑元件设置在平移质量块和倾斜质量块之间，以实现平移质量块与倾斜质量块之间的相对旋转。