公开(公告)号：US20030113981A1

公开(公告)日：2003-06-19

申请号：US10284031

申请日：2002-10-29

Applicant: STMicroelectronics S.r.I.

Inventor： Chantal Combi ,  Matteo Fiorito ,  Marta Mottura ,  Giuseppe Visalli ,  Benedetto Vigna

IPC: H01L021/00 ,  H01L021/76

CPC classification number: H01L21/764 ,  H01L21/76208 ,  H01L21/76229 ,  H01L27/08

Abstract: A process for manufacturing a semiconductor wafer integrating electronic devices and a structure for electromagnetic decoupling are disclosed. The method includes providing a wafer of semiconductor material having a substrate; forming a plurality of first mutually adjacent trenches, open on a first face of the wafer, which have a depth and a width and define walls); by thermal oxidation, completely oxidizing the walls and filling at least partially the first trenches, so as to form an insulating structure of dielectric material; and removing one portion of the substrate comprised between the insulating structure and a second face of the wafer, opposite to the first face of the wafer.

Abstract translation: 公开了一种用于制造集成电子器件的半导体晶片和用于电磁去耦的结构的工艺。 该方法包括提供具有基板的半导体材料晶片; 形成多个第一相互相邻的沟槽，在晶片的第一面上开口，其具有深度和宽度并限定壁）; 通过热氧化，完全氧化壁并至少部分地填充第一沟槽，以形成介电材料的绝缘结构; 以及移除所述绝缘结构和所述晶片的与所述晶片的第一面相对的第二面之间的衬底的一部分。

公开(公告)号：US20020109931A1

公开(公告)日：2002-08-15

申请号：US10001922

申请日：2001-11-13

Applicant: STMicroelectronics S.r.I.

Inventor： Benedetto Vigna ,  Simone Sassolini ,  Sarah Zerbini ,  Lorenzo Baldo

IPC: G11B005/596

CPC classification number: G01R33/0286 ,  G11B5/59677

Abstract: Described herein is a read/write transducer for a hard disk drivewith dual actuation stage, comprising at least one hard disk and at least one suspension carrying the read/write transducer. The read/write transducer comprises a supporting body having a substantially parallelepipedal shape, a read/write head arranged on a front face of the supporting body, and a grating defined on one of the side faces of the supporting body during the process of manufacture of the read/write transducer. The grating enables measurement of the position of the read/write transducer with respect to the corresponding suspension in an optical way using a laser transmitter emitting and directing towards the grating a laser beam, and a laser receiver arranged to intercept the laser beam reflected by the grating and outputting a position signal on the basis of which it is possible to calculate, in a simple way, the position of the read/write transducer with respect to the corresponding suspension.

Abstract translation: 这里描述了一种用于具有双驱动级的硬盘驱动器的读/写换能器，包括至少一个硬盘和至少一个承载读/写换能器的悬架。 读/写换能器包括具有基本上平行六面体形状的支撑体，布置在支撑体的前表面上的读/写头和在制造过程中在支撑体的一个侧面上限定的光栅 读/写传感器。 该光栅能够使用激光发射器以光学方式测量读/写换能器相对于相应悬架的位置，该激光发射器向激光束发射和指向光栅;以及激光接收器，被布置成拦截由 光栅并输出位置信号，基于此可以以简单的方式计算读/写换能器相对于相应悬架的位置。