公开(公告)号：US20160173992A1

公开(公告)日：2016-06-16

申请号：US14858997

申请日：2015-09-18

Applicant: STMicroelectronics S.r.l.

Inventor： Germano Nicollini ,  Silvia Adorno ,  Andrea Barbieri ,  Federica Barbieri ,  Sebastiano Conti ,  Edoardo Marino ,  Sergio Pernici

IPC: H04R19/00 ,  H04R19/02

CPC classification number: H04R19/005 ,  H04R19/02 ,  H04R19/04 ,  H04R2201/003 ,  H04R2499/11 ,  H04R2499/15

Abstract: A MEMS acoustic transducer has: a detection structure, which generates an electrical detection quantity as a function of a detected acoustic signal; and an electronic interface circuit, which is operatively coupled to the detection structure and generates an electrical output quantity as a function of the electrical detection quantity. The detection structure has a first micromechanical structure of a capacitive type and a second micromechanical structure of a capacitive type, each including a membrane that faces and is capacitively coupled to a rigid electrode and defines a respective first detection capacitor and second detection capacitor; the electronic interface circuit defines an electrical connection in series of the first detection capacitor and second detection capacitor between a biasing line and a reference line, and further has a first single-output amplifier and a second single-output amplifier, which are coupled to a respective one of the first detection capacitor and the second detection capacitor and have a respective first output terminal and second output terminal, between which the electrical output quantity is present.

Abstract translation: MEMS声换能器具有：检测结构，其产生作为检测到的声信号的函数的电检测量; 以及电子接口电路，其可操作地耦合到所述检测结构并且产生作为所述电检测量的函数的电输出量。 该检测结构具有电容型的第一微机械结构和电容式的第二微机械结构，每个微机械结构均包括面对电容耦合到刚性电极并且限定相应的第一检测电容器和第二检测电容器的膜; 电子接口电路在偏置线和参考线之间限定了第一检测电容器和第二检测电容器串联的电连接，并且还具有第一单输出放大器和第二单输出放大器，其耦合到 第一检测电容器和第二检测电容器中的一个，并且具有各自的第一输出端子和第二输出端子，其间存在电输出量。

公开(公告)号：US09961451B2

公开(公告)日：2018-05-01

申请号：US14858997

申请日：2015-09-18

Applicant: STMicroelectronics S.r.l.

Inventor： Germano Nicollini ,  Silvia Adorno ,  Andrea Barbieri ,  Federica Barbieri ,  Sebastiano Conti ,  Edoardo Marino ,  Sergio Pernici

IPC: H04R3/00 ,  H04R19/00 ,  H04R19/04 ,  H04R19/02 ,  H04R25/00

CPC classification number: H04R19/005 ,  H04R19/02 ,  H04R19/04 ,  H04R2201/003 ,  H04R2499/11 ,  H04R2499/15

Abstract: A MEMS acoustic transducer has: a detection structure, which generates an electrical detection quantity as a function of a detected acoustic signal; and an electronic interface circuit, which is operatively coupled to the detection structure and generates an electrical output quantity as a function of the electrical detection quantity. The detection structure has a first micromechanical structure of a capacitive type and a second micromechanical structure of a capacitive type, each including a membrane that faces and is capacitively coupled to a rigid electrode and defines a respective first detection capacitor and second detection capacitor; the electronic interface circuit defines an electrical connection in series of the first detection capacitor and second detection capacitor between a biasing line and a reference line, and further has a first single-output amplifier and a second single-output amplifier, which are coupled to a respective one of the first detection capacitor and the second detection capacitor and have a respective first output terminal and second output terminal, between which the electrical output quantity is present.

公开(公告)号：US09462395B2

公开(公告)日：2016-10-04

申请号：US14746252

申请日：2015-06-22

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Germano Nicollini ,  Andrea Barbieri ,  Federica Barbieri ,  Alberto Danioni ,  Edoardo Marino ,  Sergio Pernici

IPC: H04R3/00 ,  H04R19/04

CPC classification number: H04R19/04 ,  H04R3/00 ,  H04R2201/003

Abstract: A MEMS acoustic transducer device has a capacitive microelectromechanical sensing structure and a biasing circuit. The biasing circuit includes a voltage-boosting circuit that supplies a boosted voltage on an output terminal, and a high-impedance insulating circuit element set between the output terminal and a terminal of the sensing structure, which defines a first high-impedance node associated with the insulating circuit element. The biasing circuit has: a pre-charge stage that generates a first pre-charge voltage on a first output thereof, as a function of, and distinct from, the boosted voltage; and a first switch element set between the first output and the first high-impedance node. The first switch element is operable for selectively connecting the first high-impedance node to the first output, during a phase of start-up of the biasing circuit, for biasing the first high-impedance node to the first pre-charge voltage.

Abstract translation: MEMS声学换能器装置具有电容微机电感测结构和偏置电路。 偏置电路包括在输出端子上提供升压电压的升压电路和设置在感测结构的输出端子和端子之间的高阻抗绝缘电路元件，其限定与第一高阻抗节点相关联的第一高阻抗节点 绝缘电路元件。 偏置电路具有：预充电阶段，其在其第一输出上产生作为升压电压的函数并与其不同的第一预充电电压; 以及设置在第一输出和第一高阻抗节点之间的第一开关元件。 第一开关元件可操作用于在偏置电路的启动阶段期间选​​择性地将第一高阻抗节点连接到第一输出，以将第一高阻抗节点偏置到第一预充电电压。

公开(公告)号：US20160029129A1

公开(公告)日：2016-01-28

申请号：US14746252

申请日：2015-06-22

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Germano Nicollini ,  Andrea Barbieri ,  Federica Barbieri ,  Alberto Danioni ,  Edoardo Marino ,  Sergio Pernici

IPC: H04R19/04

CPC classification number: H04R19/04 ,  H04R3/00 ,  H04R2201/003

Abstract: A MEMS acoustic transducer device has a capacitive microelectromechanical sensing structure and a biasing circuit. The biasing circuit includes a voltage-boosting circuit that supplies a boosted voltage on an output terminal, and a high-impedance insulating circuit element set between the output terminal and a terminal of the sensing structure, which defines a first high-impedance node associated with the insulating circuit element. The biasing circuit has: a pre-charge stage that generates a first pre-charge voltage on a first output thereof, as a function of, and distinct from, the boosted voltage; and a first switch element set between the first output and the first high-impedance node. The first switch element is operable for selectively connecting the first high-impedance node to the first output, during a phase of start-up of the biasing circuit, for biasing the first high-impedance node to the first pre-charge voltage.

Abstract translation: MEMS声学换能器装置具有电容微机电感测结构和偏置电路。 偏置电路包括在输出端子上提供升压电压的升压电路和设置在感测结构的输出端子和端子之间的高阻抗绝缘电路元件，其限定与第一高阻抗节点相关联的第一高阻抗节点 绝缘电路元件。 偏置电路具有：预充电阶段，其在其第一输出上产生作为升压电压的函数并与其不同的第一预充电电压; 以及设置在第一输出和第一高阻抗节点之间的第一开关元件。 第一开关元件可操作用于在偏置电路的启动阶段期间选​​择性地将第一高阻抗节点连接到第一输出，以将第一高阻抗节点偏置到第一预充电电压。