Abstract:
A MEMS acoustic transducer has: a detection structure, which generates an electrical detection quantity as a function of a detected acoustic signal; and an electronic interface circuit, which is operatively coupled to the detection structure and generates an electrical output quantity as a function of the electrical detection quantity. The detection structure has a first micromechanical structure of a capacitive type and a second micromechanical structure of a capacitive type, each including a membrane that faces and is capacitively coupled to a rigid electrode and defines a respective first detection capacitor and second detection capacitor; the electronic interface circuit defines an electrical connection in series of the first detection capacitor and second detection capacitor between a biasing line and a reference line, and further has a first single-output amplifier and a second single-output amplifier, which are coupled to a respective one of the first detection capacitor and the second detection capacitor and have a respective first output terminal and second output terminal, between which the electrical output quantity is present.
Abstract:
A circuit for amplifying signals from a Micro Electro-Mechanical System (MEMS) capacitive sensor is provided. First and second input nodes receive a sensing signal applied differentially between the input nodes. A first amplifier stage and a second amplifier stage, respectively, produce a differential output signal between first and second output nodes. A common mode signal is detected at the output nodes. A voltage divider having an intermediate tap node is coupled between the first output node and the second output node. A feedback stage is coupled between the intermediate tap node of the voltage divider and the inputs of the first amplifier stage and the second amplifier stage, where the feedback line is sensitive to the common mode signal at the output nodes.
Abstract:
In an embodiment, an electronic circuit includes: an input differential pair including first and second transistors; a first pair of transistors in emitter-follower configuration including third and fourth transistors, and an output differential pair including fifth and sixth transistors. The third transistor has a control terminal coupled to the first transistor, and a current path coupled to a first output terminal. The fourth transistor has a control terminal coupled to the second transistor, and a current path coupled to a second output terminal. The fifth transistor has a control terminal coupled to the first transistor, and a first current path terminal coupled to the first output terminal. The sixth transistor has a control terminal coupled to the second transistor, and a first current path terminal coupled to the second output terminal. First and second termination resistors are coupled between the first pair of transistors and the output differential pair.
Abstract:
In an embodiment, an electronic circuit includes: an input differential pair including first and second transistors; a first pair of transistors in emitter-follower configuration including third and fourth transistors, and an output differential pair including fifth and sixth transistors. The third transistor has a control terminal coupled to the first transistor, and a current path coupled to a first output terminal. The fourth transistor has a control terminal coupled to the second transistor, and a current path coupled to a second output terminal. The fifth transistor has a control terminal coupled to the first transistor, and a first current path terminal coupled to the first output terminal. The sixth transistor has a control terminal coupled to the second transistor, and a first current path terminal coupled to the second output terminal. First and second termination resistors are coupled between the first pair of transistors and the output differential pair.
Abstract:
A circuit for amplifying signals from a Micro Electro-Mechanical System (MEMS) capacitive sensor is provided. First and second input nodes receive a sensing signal applied differentially between the input nodes. A first amplifier stage and a second amplifier stage, respectively, produce a differential output signal between first and second output nodes. A common mode signal is detected at the output nodes. A voltage divider having an intermediate tap node is coupled between the first output node and the second output node. A feedback stage is coupled between the intermediate tap node of the voltage divider and the inputs of the first amplifier stage and the second amplifier stage, where the feedback line is sensitive to the common mode signal at the output nodes.
Abstract:
A circuit for amplifying signals from a Micro Electro-Mechanical System (MEMS) capacitive sensor is provided. First and second input nodes receive a sensing signal applied differentially between the input nodes. A first amplifier stage and a second amplifier stage, respectively, produce a differential output signal between first and second output nodes. A common mode signal is detected at the output nodes. A voltage divider having an intermediate tap node is coupled between the first output node and the second output node. A feedback stage is coupled between the tap node of the voltage divider and the inputs of the first amplifier stage and the second amplifier stage, where the feedback line is sensitive to the common mode signal at the output nodes.
Abstract:
A MEMS acoustic transducer has: a detection structure, which generates an electrical detection quantity as a function of a detected acoustic signal; and an electronic interface circuit, which is operatively coupled to the detection structure and generates an electrical output quantity as a function of the electrical detection quantity. The detection structure has a first micromechanical structure of a capacitive type and a second micromechanical structure of a capacitive type, each including a membrane that faces and is capacitively coupled to a rigid electrode and defines a respective first detection capacitor and second detection capacitor; the electronic interface circuit defines an electrical connection in series of the first detection capacitor and second detection capacitor between a biasing line and a reference line, and further has a first single-output amplifier and a second single-output amplifier, which are coupled to a respective one of the first detection capacitor and the second detection capacitor and have a respective first output terminal and second output terminal, between which the electrical output quantity is present.
Abstract:
A MEMS acoustic transducer device has a capacitive microelectromechanical sensing structure and a biasing circuit. The biasing circuit includes a voltage-boosting circuit that supplies a boosted voltage on an output terminal, and a high-impedance insulating circuit element set between the output terminal and a terminal of the sensing structure, which defines a first high-impedance node associated with the insulating circuit element. The biasing circuit has: a pre-charge stage that generates a first pre-charge voltage on a first output thereof, as a function of, and distinct from, the boosted voltage; and a first switch element set between the first output and the first high-impedance node. The first switch element is operable for selectively connecting the first high-impedance node to the first output, during a phase of start-up of the biasing circuit, for biasing the first high-impedance node to the first pre-charge voltage.
Abstract:
A MEMS acoustic transducer device has a capacitive microelectromechanical sensing structure and a biasing circuit. The biasing circuit includes a voltage-boosting circuit that supplies a boosted voltage on an output terminal, and a high-impedance insulating circuit element set between the output terminal and a terminal of the sensing structure, which defines a first high-impedance node associated with the insulating circuit element. The biasing circuit has: a pre-charge stage that generates a first pre-charge voltage on a first output thereof, as a function of, and distinct from, the boosted voltage; and a first switch element set between the first output and the first high-impedance node. The first switch element is operable for selectively connecting the first high-impedance node to the first output, during a phase of start-up of the biasing circuit, for biasing the first high-impedance node to the first pre-charge voltage.