SYSTEM FOR CONTROLLING LINEAR AXIS OF A MEMS MIRROR

    公开(公告)号:US20210409661A1

    公开(公告)日:2021-12-30

    申请号:US17356162

    申请日:2021-06-23

    Abstract: A device has memory and processing circuitry coupled to the memory. The processing circuitry generates a resonant axis drive signal to drive a Micro Electro Mechanical System (MEMS) mirror system at a resonance frequency, and generates a linear axis drive signal to drive the MEMS mirror system at a linear frequency corresponding to a video frame rate. Generating the linear axis drive signal includes generating, using interpolation, a current set of shape values based on a stored set of shape values and an indication of the video frame rate. The linear axis drive signal is generated using the current set of shape values.

    CLOSED-LOOP POSITION CONTROL OF MEMS MICROMIRRORS

    公开(公告)号:US20220171180A1

    公开(公告)日:2022-06-02

    申请号:US17109929

    申请日:2020-12-02

    Abstract: Disclosed herein is a control system for a projection system, including a first subtractor receiving an input drive signal and a feedback signal and generating a first difference signal therefrom, the feedback signal being indicative of position of a quasi static micromirror of the projection system. A type-2 compensator receives the first difference signal and generates therefrom a first output signal. A derivative based controller receives the feedback signal and generates therefrom a second output signal. A second subtractor receives the first and second output signals and generates a second difference signal therefrom. The second difference signal serves to control a mirror driver of the projection system. A higher order resonance equalization circuit receives a pre-output signal from an analog front end of the projection system that is indicative of position of the quasi static micromirror, and generates the feedback signal therefrom.

    MEMS DEVICE WITH TILTABLE STRUCTURE AND IMPROVED CONTROL

    公开(公告)号:US20220334378A1

    公开(公告)日:2022-10-20

    申请号:US17720506

    申请日:2022-04-14

    Abstract: A MEMS device includes a semiconductor body with a cavity and forming an anchor portion, a tiltable structure elastically suspended over the cavity, first and second support arms to support the tiltable structure, and first and second piezoelectric actuation structures biasable to deform mechanically, generating a rotation of the tiltable structure around a rotation axis. The piezoelectric actuation structures carry first and second piezoelectric displacement sensors. When the tiltable structure rotates around the rotation axis, the displacement sensors are subject to respective mechanical deformations and generate respective sensing signals in phase opposition to each other, indicative of the rotation of the tiltable structure. The sensing signals are configured to be acquired in a differential manner.

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