公开(公告)号：US20220102618A1

公开(公告)日：2022-03-31

申请号：US17485719

申请日：2021-09-27

Applicant: STMicroelectronics S.r.l.

Inventor： Domenico GIUSTI ,  Irene MARTINI ,  Davide ASSANELLI ,  Paolo FERRARINI ,  Carlo Luigi PRELINI ,  Fabio QUAGLIA

IPC: H01L41/08 ,  H01L41/047 ,  H01L41/277 ,  B81B7/02 ,  H01L41/113

Abstract: A piezoelectric microelectromechanical structure is provided with a piezoelectric stack having a main extension in a horizontal plane and a variable section in a plane transverse to the horizontal plane. The stack is formed by a bottom-electrode region, a piezoelectric material region arranged on the bottom-electrode region, and a top-electrode region arranged on the piezoelectric material region. The piezoelectric material region has, as a result of the variable section, a first thickness along a vertical axis transverse to the horizontal plane at a first area, and a second thickness along the same vertical axis at a second area. The second thickness is smaller than the first thickness. The structure at the first and second areas can form piezoelectric detector and a piezoelectric actuator, respectively.

公开(公告)号：US20200369029A1

公开(公告)日：2020-11-26

申请号：US16879269

申请日：2020-05-20

Applicant: STMicroelectronics S.r.l.

Inventor： Davide ASSANELLI ,  Irene MARTINI ,  Lorenzo VINCIGUERRA ,  Carla Maria LAZZARI ,  Paolo FERRARINI

IPC: B41J2/14 ,  H01L41/047 ,  H01L41/053 ,  H01L41/09 ,  H01L41/187 ,  H01L41/23 ,  H01L41/29 ,  H01L41/332

Abstract: A piezoelectric transducer includes a semiconductor body with a bottom electrode of conductive material. A piezoelectric element is on the bottom electrode. A first protective layer, on the bottom electrode and the piezoelectric element, has a first opening through which a portion of the piezoelectric element is exposed, and a second opening through which a portion of the bottom electrode is exposed. A conductive layer on the first protective layer and within the first and second openings is patterned to form a top electrode in electrical contact with the piezoelectric element at the first opening, a first biasing stripe in electrical contact with the top electrode, and a second biasing stripe in electrical contact with the bottom electrode at the second opening.