公开(公告)号：US20230161242A1

公开(公告)日：2023-05-25

申请号：US17865027

申请日：2022-07-14

Applicant: Samsung Display Co., LTD.

Inventor： Suk Beom YOU ,  Kyongho HONG ,  Myungkyu KIM ,  Chang-Kon PARK ,  Dongjae LEE

IPC: G03F1/64

CPC classification number: G03F1/64 ,  H01L51/56

Abstract: A mask assembly according to an embodiment includes a support frame including at least four sides, a first frame disposed on the support frame and extending in a first direction, a second frame disposed on the support frame and extending in a second direction intersecting the first direction, and a mask sheet disposed on the support frame and including at least one opening. At least a side of the support frame includes a first protruding portion disposed at a first edge of the side, a second protruding portion disposed at a second edge of the side, and a recess portion disposed between the first protruding portion and the second protruding portion.

公开(公告)号：US20230147723A1

公开(公告)日：2023-05-11

申请号：US17894625

申请日：2022-08-24

Applicant: Samsung Display Co., LTD.

Inventor： Kyongho HONG ,  Myungkyu KIM ,  Chang-Kon PARK ,  Sukbeom YOU ,  Dongjae LEE

IPC: C23C14/04

CPC classification number: C23C14/042

Abstract: A loading apparatus for a deposition mask includes a clamper that clamps the mask extending in a direction, a first adsorption part, a second adsorption part, and a connection part connected to the first adsorption part and the second adsorption part, and includes a picker that transfers the mask. In case that the picker transfers the mask, the first adsorption part adsorbs ends of the mask, the second adsorption unit adsorbs a portion between the ends of the mask, and the clamper clamps the mask between the first adsorption part and the second adsorption part.

公开(公告)号：US20230189625A1

公开(公告)日：2023-06-15

申请号：US18079966

申请日：2022-12-13

Applicant: Samsung Display Co., Ltd.

Inventor： Myungkyu KIM ,  Changkon PARK ,  Sukbeom YOU ,  Dongjae LEE ,  Kyongho HONG

IPC: H10K71/00 ,  C23C14/04

CPC classification number: H01L51/56 ,  C23C14/042

Abstract: A mask stage includes plates disposed adjacent to each other, the plates forming a closed loop in a plan view, and a connection portion connecting adjacent ones among the plates to each other, the connection portion being detachable from the plates. The mask stage supports a mask frame.