公开(公告)号：US20250011921A1

公开(公告)日：2025-01-09

申请号：US18896073

申请日：2024-09-25

Applicant: Samsung Display Co., LTD.

Inventor： Junggon KIM ,  Choelmin JANG

IPC: C23C16/04 ,  C23C16/458 ,  H01L25/075 ,  H01L33/00

Abstract: A device for manufacturing a display apparatus includes a chamber including a first zone, a second zone, and a third zone arranged along a linear path, an inorganic film deposition mask disposed in the first zone, an organic film deposition mask disposed in the second zone, a deposition unit disposed in the third zone, and a susceptor which reciprocates between the first zone, the second zone, and the third zone.

公开(公告)号：US20230144827A1

公开(公告)日：2023-05-11

申请号：US17984500

申请日：2022-11-10

Applicant: Samsung Display Co., LTD.

Inventor： Choelmin JANG ,  Junggon KIM ,  Min-Gyu PARK ,  Heeyong LEE ,  Eun JUNG ,  Myungsoo HUH

IPC: B05C11/10 ,  B05C5/02 ,  B05C15/00 ,  B05B15/65 ,  B05B15/70 ,  B05B15/62

CPC classification number: B05C11/1044 ,  B05C5/0287 ,  B05C11/1039 ,  B05C15/00 ,  B05B15/65 ,  B05B15/70 ,  B05B15/62

Abstract: A substrate processing apparatus may include a chamber having a working space, maintaining a vacuum state, and including an upper wall positioned on the working space, a nozzle assembly positioned in the working space, and including nozzles, and a lifting module including a frame positioned outside of the chamber, a lifting part that lifts the frame, and at least one shaft passing through the upper wall, connected to each of the frame and the nozzle assembly, and extending in a direction of gravity.