专利检索 ap:("Samsung Display Co., LTD.") AND inv:"Sang Jin HAN" 第 1 页

1.

发明公开
DEPOSITION APPARATUS AND METHOD OF CLEANSING THE SAME 审中-公开

公开(公告)号：US20230227971A1

公开(公告)日：2023-07-20

申请号：US18080935

申请日：2022-12-14

申请人： Samsung Display Co., LTD.

发明人： JONGBUN HAN , JUHEE LEE , Suk Won JUNG , Sang Jin HAN

IPC分类号： C23C16/44 , H01J37/32 , B08B5/00 , B08B13/00

CPC分类号： C23C16/4405 , H01J37/32449 , H01J37/32862 , H01J37/32816 , B08B5/00 , B08B13/00 , H01J2237/24585 , H01J2237/186 , H01J37/32633 , H01J2237/182

摘要： An embodiment provides a deposition apparatus, including: a process chamber; a residual gas analyzer connected to the process chamber; a cleansing gas supplier connected to the process chamber; and a driver that is connected to the residual gas analyzer and the cleansing gas supplier and controls the residual gas analyzer and the cleansing gas supplier.