公开(公告)号：US20230253190A1

公开(公告)日：2023-08-10

申请号：US18133408

申请日：2023-04-11

Applicant: Samsung Display Co., LTD.

Inventor： Kwan Yong LEE ,  Yong Kuk KIM ,  Ji Hoon SHIN ,  Chang Jo LEE ,  Sung Ryul CHO ,  Sang Jin HA

IPC: H01J37/32 ,  C23C14/34 ,  C23C14/35

CPC classification number: H01J37/32559 ,  C23C14/3407 ,  C23C14/351 ,  H01J37/32651 ,  H01J37/3266 ,  H01J37/32807 ,  C23C14/3471

Abstract: A deposition apparatus includes a shield member having a lattice shape in a plan view, the lattice shape including short side edges extending along a first direction and long side edges extending along a second direction, the short side edges including first and second short side edges, a bracket member including a first bracket member coupled to the first short side edge, and a second bracket member coupled to the second short side edge, a plurality of anode bars extending along the second direction and stably placed on each of the first bracket member and the second bracket member, and a target member covering the plurality of anode bars. An anode bar of the plurality of anode bars protrudes outward beyond at least one of the first bracket member and the second bracket member, and the anode bar is physically separated from the shield member by the bracket member.

公开(公告)号：US20210375595A1

公开(公告)日：2021-12-02

申请号：US17163335

申请日：2021-01-29

Applicant: Samsung Display Co., LTD.

Inventor： Kwan Yong LEE ,  Yong Kuk KIM ,  Ji Hoon SHIN ,  Chang Jo LEE ,  Sung Ryul CHO ,  Sang Jin HA

IPC: H01J37/32 ,  C23C14/35 ,  C23C14/34

Abstract: A deposition apparatus includes a shield member having a lattice shape in a plan view, the lattice shape including short side edges extending along a first direction and long side edges extending along a second direction, the short side edges including first and second short side edges, a bracket member including a first bracket member coupled to the first short side edge, and a second bracket member coupled to the second short side edge, a plurality of anode bars extending along the second direction and stably placed on each of the first bracket member and the second bracket member, and a target member covering the plurality of anode bars. An anode bar of the plurality of anode bars protrudes outward beyond at least one of the first bracket member and the second bracket member, and the anode bar is physically separated from the shield member by the bracket member.