公开(公告)号：US20230221642A1

公开(公告)日：2023-07-13

申请号：US18083719

申请日：2022-12-19

Applicant: Samsung Display Co., Ltd.

Inventor： CHEOLRAE JO ,  CHEOLLAE ROH ,  SANGJIN HAN ,  SEUNGHO MYOUNG

IPC: G03F7/09 ,  G03F1/60 ,  G03F1/68

CPC classification number: G03F7/09 ,  G03F1/60 ,  G03F1/68 ,  G01C19/04

Abstract: A mask, a mask assembly including a mask, and a substrate transfer apparatus including a mask. According to an embodiment, a mask includes a frame including an opening, accommodation structure disposed on the frame and including an accommodation space shielded from an outside, and a sensor disposed in the accommodation space.

公开(公告)号：US20240209490A1

公开(公告)日：2024-06-27

申请号：US18499553

申请日：2023-11-01

Applicant: Samsung Display Co., LTD.

Inventor： SUNGYONG LEE ,  CHUNYOUNG PARK ,  YOUNG-MOOK CHOI ,  CHEOLRAE JO

IPC: C23C14/04 ,  C23C14/24 ,  H10K71/16

CPC classification number: C23C14/042 ,  C23C14/24 ,  H10K71/166 ,  H10K71/164

Abstract: A mask assembly includes a stage having a rectangular shape in a plan view, and including a first surface and a second surface opposite to each other and extending in a first direction, where the stage includes a first magnet adjacent to the first surface, a first protrusion protruding from the first surface of the stage in a second direction crossing the first direction, and a second protrusion protruding from the second surface of the stage in a third direction opposite to the second direction, where the second protrusion includes a second magnet.