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公开(公告)号:US11706944B2
公开(公告)日:2023-07-18
申请号:US17078015
申请日:2020-10-22
Applicant: Samsung Display Co., Ltd.
Inventor: Young Seok Baek , Chong Sup Chang , Hana Seo , Eui Kang Heo
IPC: H01L51/52 , H10K50/844 , H10K71/00
CPC classification number: H10K50/844 , H10K71/00
Abstract: A method of manufacturing a display device may include sequentially forming a first conductive layer, a second conductive layer including copper (Cu), a third conductive layer, and a fourth conductive layer on a substrate, patterning the first conductive layer, the second conductive layer, the third conductive layer, and the fourth conductive layer together to form a conductive pattern including a first layer, a second layer, a third layer, and a fourth layer sequentially on the substrate, removing the fourth layer of the conductive pattern, forming a protective layer covering at least a sidewall of the conductive layer on the substrate, and forming a display element on the protective layer.