公开(公告)号：US20150009483A1

公开(公告)日：2015-01-08

申请号：US14172013

申请日：2014-02-04

Applicant: Samsung Display Co., Ltd.

Inventor： Ho Eoun KIM

IPC: G03F7/20

CPC classification number: G03F7/707 ,  B05B12/20 ,  B05C17/08 ,  B05C21/005 ,  C23C14/042 ,  C23C16/042 ,  G03F7/70691 ,  G03F7/7075 ,  G03F7/70783 ,  H01L51/0011

Abstract: A manufacturing method of a mask includes aligning a mask sheet including an effective area and a non-effective area, on a mask frame; applying a pressure to the non-effective area of the mask sheet in a direction opposite to a sagging direction of the non-effective area, to prevent sagging of the non-effective area; and moving a clamping unit to the mask sheet along a direction substantially parallel to the mask sheet, to clamp the clamping unit onto the non-effective area of the mask sheet.

Abstract translation: 掩模的制造方法包括将包括有效区域和非有效区域的掩模片对准在掩模框上; 以与非有效区域的下垂方向相反的方向对掩模板的非有效区域施加压力，以防止无效区域的下垂; 并且沿着基本上平行于掩模片的方向将夹持单元移动到掩模片，以将夹紧单元夹紧到掩模片的非有效区域上。