公开(公告)号：US20180190832A1

公开(公告)日：2018-07-05

申请号：US15716641

申请日：2017-09-27

Applicant: Samsung Display Co., Ltd.

Inventor： PIL SOON HONG ,  HYUNYOUNG JUNG ,  CHULWON PARK ,  GWUI-HYUN PARK ,  JEONGMIN PARK

IPC: H01L29/786 ,  H01L29/66

Abstract: A display apparatus includes a thin film transistor on a first base substrate, the thin film transistor including a gate electrode disposed on the first base substrate, an active pattern disposed on the first base substrate and including a semiconductor layer including of amorphous silicon and an ohmic contact layer which is on the semiconductor layer, a drain electrode disposed on the ohmic contact layer and having a first thickness, and a source electrode disposed on the ohmic contact layer and having a second thickness which is greater than the first thickness.

公开(公告)号：US20240044741A1

公开(公告)日：2024-02-08

申请号：US18225534

申请日：2023-07-24

Applicant: Samsung Display Co., Ltd. ,  HIMS CO., LTD.

Inventor： CHANHYEONG CHO ,  TAE JOON KIM ,  JEONGMIN PARK ,  HYEONGUK YEO ,  JUIL KIM ,  DAEHOON MIN

IPC: G01M11/02 ,  G03F7/00

CPC classification number: G01M11/0257 ,  G03F7/7065 ,  G03F7/70441

Abstract: A photomask inspection apparatus includes a stage which supports an inspection substrate, a first optical system having a first numerical aperture and disposed at one side of the inspection substrate, a second optical system having a second numerical aperture, spaced apart from the first optical system, and disposed at the one side of the inspection substrate, an imaging optical system including a first objective lens aligned with the first optical system with the inspection substrate disposed therebetween, a second objective lens aligned with the second optical system with the inspection substrate disposed therebetween, and disposed at another side of the inspection substrate, which is opposite to the one side of the inspection substrate, and a camera which captures an image passed through the imaging optical system. The first numerical aperture is greater than the second numerical aperture.

公开(公告)号：US20180092225A1

公开(公告)日：2018-03-29

申请号：US15686462

申请日：2017-08-25

Applicant: Samsung Display Co., Ltd.

Inventor： Junhong Park ,  JUNG-SOO LEE ,  JEONGMIN PARK

IPC: H05K5/00 ,  H04N9/31 ,  H05K7/06

CPC classification number: H05K5/0017 ,  G02F1/136227 ,  G02F2201/40 ,  H04N9/3102 ,  H05K7/06

Abstract: A display apparatus includes a base substrate, a first conductive pattern disposed on the base substrate, a first insulation layer disposed on the base substrate to cover the first conductive pattern, where a first contact hole is defined through the first insulation layer, a first pattern disposed on the first insulation layer, where the first pattern is in contact with the first conductive pattern through the first contact hole, a first filling pattern disposed in a recess of the first pattern which is defined by the first contact hole, a second insulation layer disposed on the first pattern and the first insulation layer, where a second contact hole overlapping the first contact hole is defined through the second insulation layer, and a second conductive pattern electrically connected to the first pattern through the second contact hole.