公开(公告)号：US20220297236A1

公开(公告)日：2022-09-22

申请号：US17838243

申请日：2022-06-12

Applicant: Samsung Display Co., Ltd.

Inventor： Taekil OH ,  Gyoowan HAN ,  Wonyong KIM ,  Seungho Myoung ,  Jaeseok Park ,  Alexander VORONOV ,  Jinhong JEUN

IPC: B23K26/362 ,  C22C38/08 ,  B23K26/067 ,  B23K26/082 ,  B23K26/06 ,  B23K26/382

Abstract: An apparatus for manufacturing a deposition mask including a stage on which a mask substrate is mounted, a light source configured to irradiate a laser beam, a beam splitter configured to split the irradiated laser beam into a plurality of laser beams, a scanner configured to simultaneously scan the plurality of laser beams onto the mask substrate, and a tuner configured to finely change irradiation states of the plurality of laser beams to correspond to shapes of a plurality of pattern holes, while the plurality of laser beams are scanned.