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公开(公告)号：US20220297236A1
公开(公告)日：2022-09-22
申请号：US17838243
申请日：2022-06-12
发明人： Taekil OH , Gyoowan HAN , Wonyong KIM , Seungho Myoung , Jaeseok Park , Alexander VORONOV , Jinhong JEUN
IPC分类号： B23K26/362 , C22C38/08 , B23K26/067 , B23K26/082 , B23K26/06 , B23K26/382
摘要： An apparatus for manufacturing a deposition mask including a stage on which a mask substrate is mounted, a light source configured to irradiate a laser beam, a beam splitter configured to split the irradiated laser beam into a plurality of laser beams, a scanner configured to simultaneously scan the plurality of laser beams onto the mask substrate, and a tuner configured to finely change irradiation states of the plurality of laser beams to correspond to shapes of a plurality of pattern holes, while the plurality of laser beams are scanned.
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公开(公告)号：US20140353523A1
公开(公告)日：2014-12-04
申请号：US14094051
申请日：2013-12-02
发明人： Alexander VORONOV , Suk-Ho LEE , Jae-Seung YOO , Kyung-Hoe HEO , Gyoo-Wan HAN
CPC分类号： G01N21/6489 , G01N21/9501
摘要： A method for inspecting a polysilicon layer includes: radiating excitation light to the polysilicon layer; and detecting a photoluminescence signal generated by the excitation light, wherein average power of the excitation light has a range of 1 W/cm2 to 10 W/cm2, and peak power of the excitation light has a range of 100 W/cm2 to 1000 W/cm2.
摘要翻译： 一种用于检查多晶硅层的方法包括：向多晶硅层辐射激发光; 并且检测由激发光产生的光致发光信号，其中激发光的平均功率具有1W / cm 2至10W / cm 2的范围，并且激发光的峰值功率具有100W / cm 2至1000W的范围 / cm2。
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3.发明申请公开(公告)号：US20190187416A1
公开(公告)日：2019-06-20
申请号：US16114712
申请日：2018-08-28
发明人： Emil ASLANOV , Alexander VORONOV , Gyoo Wan HAN
CPC分类号： G02B13/0005 , G02B13/22 , G02B27/0031 , G02B27/4211 , G02B27/4227
摘要： An F-theta lens includes a diffractive optical element and a plurality of spherical lenses. The diffractive optical element includes multi-level diffractive structure having three or more levels and defined on a surface thereof, and the diffractive optical element is arranged before the spherical lenses on a path of a laser beam.
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公开(公告)号：US20180149604A1
公开(公告)日：2018-05-31
申请号：US15825842
申请日：2017-11-29
发明人： Alexander VORONOV , Gyoo Wan HAN , Ku Hyun KANG
IPC分类号： G01N21/956 , B23K26/00 , B23K26/03
CPC分类号： G01N21/956 , B23K26/032 , B23K26/359 , G01N2021/9513
摘要： A patterning apparatus includes a laser generator, at least one lens, a detector, and a controller. The laser generator generates a first laser beam and a second laser beam having different intensities. The at least one lens irradiates the first laser beam to form a pattern in a substrate, irradiates a second laser beam to determine a defect of the pattern, and condenses reflected beams generated as the second laser beam is reflected from the substrate. The detector converts the reflected beams to electrical signals. The controller determines a defect of the pattern based on the electrical signals.
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5.发明申请公开(公告)号：US20220088702A1
公开(公告)日：2022-03-24
申请号：US17340832
申请日：2021-06-07
发明人： Alexander VORONOV , Gyoo Wan HAN , Woo Hyun JUNG , Jung Hwa YOU
IPC分类号： B23K26/042 , B23K26/06 , B23K26/046 , B23K26/082
摘要： Provided is a laser device. The laser device according to an embodiment comprises a laser source that provides a laser beam to a process object, a laser deflector that deflects the laser beam supplied from the laser source, an object lens that focuses scattered light of the laser beam that has been incident on the process object and then scattered, an image capture device that captures an image of the scattered light focused in the object lens, and a corrector that corrects a position of the laser beam by using the captured image.
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公开(公告)号：US20190154514A1
公开(公告)日：2019-05-23
申请号：US16154807
申请日：2018-10-09
发明人： Emil ASLANOV , Alexander VORONOV , Gyoo Wan HAN
IPC分类号： G01J9/02
摘要： A shearing interferometer includes first and second shearing plates disposed opposite to each other. The first shearing plate includes a first front surface and a first back surface, and splits an input beam input to the first front surface into first and second beams reflected at the first front and back surfaces, respectively. The second shearing plate includes a second front surface and a second back surface. The second shearing plate splits the first beam into third and fourth beams reflected at the second front and back surfaces, respectively, and splits the second beam into fifth and sixth beams reflected at the second front and back surfaces, respectively. Each of the first and second shearing plates has a thickness which limits a phase delay between the fourth beam and the fifth beam to a degree determined to allow interference to occur between the fourth beam and the fifth beam.
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公开(公告)号：US20230135389A1
公开(公告)日：2023-05-04
申请号：US17979724
申请日：2022-11-02
摘要： An optical system includes a phase retardation plate which controls a polarization of an input laser beam, an axicon lens spaced apart from the phase retardation plate on an emitting surface side thereof to convert the input laser beam into a single first Bessel beam having a single cone angle, a collimating lens spaced apart from the axicon lens on an emitting surface side thereof to collimate the single first Bessel beam in a form of a single second Bessel beam having an annular energy distribution, a polarizing beam splitter spaced apart from the collimating lens on an emitting surface side thereof to split the single second Bessel beam into third Bessel beams having different polarization directions, and a focusing lens spaced apart from the polarizing beam splitter on an emitting surface side thereof to focus the plurality of third Bessel beams to form an output laser beam.
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