公开(公告)号：US10103180B2

公开(公告)日：2018-10-16

申请号：US13627094

申请日：2012-09-26

Applicant: Samsung Display Co., Ltd.

Inventor： Tae-Yong Kim ,  Joon-Hyung Kim ,  Je-Kil Ryu ,  Sung-Gon Kim ,  Pil-Kyu Kim

IPC: H01L27/12 ,  B23K26/082 ,  H01L51/56 ,  H01L27/32 ,  B23K101/40

Abstract: A crystallization apparatus for crystallizing a semiconductor layer formed on a substrate. The crystallization apparatus includes a laser generator, which generates a laser beam, an optical device for changing a path of the laser beam emitted from the laser generating device, and a stage on which the substrate is arranged, wherein the optical device changes the path of the laser beam by rotating with respect to a constant axis, and the stage is moved so that the laser beam having the changed path is irradiated to a constant region on the semiconductor layer.

公开(公告)号：US20130137204A1

公开(公告)日：2013-05-30

申请号：US13627094

申请日：2012-09-26

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Tae-Yong Kim ,  Joon-Hyung Kim ,  Je-Kil Ryu ,  Sung-Gon Kim ,  Pil-Kyu Kim

IPC: H01L21/268 ,  B23K26/00 ,  H01L51/56

CPC classification number: H01L27/1285 ,  B23K26/082 ,  B23K2101/40 ,  H01L27/3262 ,  H01L51/56

Abstract: A crystallization apparatus for crystallizing a semiconductor layer formed on a substrate. The crystallization apparatus includes a laser generator, which generates a laser beam, an optical device for changing a path of the laser beam emitted from the laser generating device, and a stage on which the substrate is arranged, wherein the optical device changes the path of the laser beam by rotating with respect to a constant axis, and the stage is moved so that the laser beam having the changed path is irradiated to a constant region on the semiconductor layer.

Abstract translation: 一种用于使形成在基板上的半导体层结晶的结晶装置。 结晶装置包括产生激光束的激光发生器，用于改变从激光产生装置发射的激光束的路径的光学装置和布置基板的台，其中光学装置改变 所述激光束相对于恒定轴旋转，并且所述载物台移动，使得具有改变路径的激光束照射到所述半导体层上的恒定区域。