Display device and method of manufacturing the same

    公开(公告)号:US10043860B2

    公开(公告)日:2018-08-07

    申请号:US15605431

    申请日:2017-05-25

    Abstract: A method of manufacturing a display device includes: forming an active layer on a substrate; forming a first insulation layer covering the active layer; forming a gate metal line on the first insulation layer; forming a third insulation layer covering the gate metal line and including a silicon oxide; forming a fourth insulation layer including a silicon nitride on the third insulation layer; forming a fifth insulation layer including a silicon oxide on the fourth insulation layer; arranging a blocking member over a region in which the active layer and the gate metal line overlap; forming a fifth auxiliary insulation layer by doping nitrogen ions in the fifth insulation layer; and exposing a part of an upper surface of the fourth insulation layer by removing a portion of a fifth main insulation layer of the fifth insulation layer which does not overlap the fifth auxiliary insulation layer.

    Thin film transistor, thin film transistor array panel, and manufacturing method of thin film transistor
    4.
    发明授权
    Thin film transistor, thin film transistor array panel, and manufacturing method of thin film transistor 有权
    薄膜晶体管,薄膜晶体管阵列面板以及薄膜晶体管的制造方法

    公开(公告)号:US09553201B2

    公开(公告)日:2017-01-24

    申请号:US14179452

    申请日:2014-02-12

    CPC classification number: H01L29/7869 H01L29/78696

    Abstract: The inventive concept relates to a thin film transistor and a thin film transistor array panel and, in detail, relates to a thin film transistor including an oxide semiconductor. A thin film transistor according to an exemplary embodiment of the inventive concept includes: a gate electrode; a gate insulating layer positioned on or under the gate electrode; a first semiconductor and a second semiconductor that overlap the gate electrode with the gate insulating layer interposed therebetween, the first semiconductor and the second semiconductor contacting each other; a source electrode connected to the second semiconductor; and a drain electrode connected to the second semiconductor and facing the source electrode, wherein the second semiconductor includes gallium (Ga) that is not included in the first semiconductor, and a content of gallium (Ga) in the second semiconductor is greater than 0 at. % and less than or equal to about 33 at. %.

    Abstract translation: 本发明构思涉及薄膜晶体管和薄膜晶体管阵列面板,并且详细地涉及包括氧化物半导体的薄膜晶体管。 根据本发明构思的示例性实施例的薄膜晶体管包括:栅电极; 位于栅极电极上或下方的栅极绝缘层; 第一半导体和第二半导体,其与栅电极重叠,栅极绝缘层插入其间,第一半导体和第二半导体彼此接触; 连接到所述第二半导体的源电极; 和连接到第二半导体并面向源电极的漏电极,其中第二半导体包括不包括在第一半导体中的镓(Ga),并且第二半导体中的镓(Ga)的含量大于0 。 %且小于或等于约33at。 %。

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