Apparatus and method for manufacturing display device

    公开(公告)号:US11145846B2

    公开(公告)日:2021-10-12

    申请号:US16798924

    申请日:2020-02-24

    IPC分类号: H01L51/56 H01L27/32 H01L51/00

    摘要: An apparatus and a method for manufacturing a display device are provided. An apparatus for manufacturing a display device includes a first unit configured to remove impurities of a support substrate, a second unit configured to form a sacrificial layer on the support substrate, a third unit configured to form a flexible substrate on the sacrificial layer, and a fourth unit configured to form a display unit on the flexible substrate. The second unit includes a moving unit movable in a first direction to receive the support substrate, a first supply nozzle configured to spray a solution onto the support substrate to coat a graphene oxide layer, and a second supply nozzle configured to dry the graphene oxide layer coated on the support substrate while removing a portion of the graphene oxide layer, to form the sacrificial layer.

    APPARATUS AND METHOD FOR MANUFACTURING DISPLAY DEVICE

    公开(公告)号:US20200321563A1

    公开(公告)日:2020-10-08

    申请号:US16798924

    申请日:2020-02-24

    IPC分类号: H01L51/56

    摘要: An apparatus and a method for manufacturing a display device are provided. An apparatus for manufacturing a display device includes a first unit configured to remove impurities of a support substrate, a second unit configured to form a sacrificial layer on the support substrate, a third unit configured to form a flexible substrate on the sacrificial layer, and a fourth unit configured to form a display unit on the flexible substrate. The second unit includes a moving unit movable in a first direction to receive the support substrate, a first supply nozzle configured to spray a solution onto the support substrate to coat a graphene oxide layer, and a second supply nozzle configured to dry the graphene oxide layer coated on the support substrate while removing a portion of the graphene oxide layer, to form the sacrificial layer.