公开(公告)号：US20140182785A1

公开(公告)日：2014-07-03

申请号：US13902698

申请日：2013-05-24

Applicant: Samsung Display Co., Ltd.

Inventor： Sung-Hwan Kim ,  Sang-Su Kim ,  Byoung-Seong Jeong ,  Je-Hyun Song ,  Tae-Hun Lee ,  Sung-Won Yang ,  Tae-Hyung Kim

IPC: B29C59/14

CPC classification number: B23K26/70 ,  B23K26/032 ,  B23K26/0823 ,  B23K26/083 ,  B23K26/0876 ,  B23K26/123 ,  B23K26/361 ,  B23K31/10 ,  B23K2103/30 ,  B23K2103/50 ,  G09G3/006 ,  G09G3/3208 ,  H01L21/67069 ,  H01L21/76894 ,  H01L22/12 ,  H01L51/56

Abstract: A multi-functional apparatus for testing and etching a substrate capable of increasing spatial efficiency and manufacturing efficiency by performing testing and etching operations in a same chamber body and a substrate processing apparatus including the same, the multi-functional apparatus including a chamber body having an entrance into which the substrate is injected in one of its sides and an exit from which the substrate is ejected in another one of its sides; a transfer unit disposed inside of the chamber body and for transferring the injected substrate in a direction from the entrance to the exit; a laser etching unit disposed on an upper portion of the transfer unit and for etching a part of the substrate disposed on the transfer unit; and a testing unit for testing the substrate disposed on the transfer unit.

Abstract translation: 一种用于测试和蚀刻基板的多功能设备，其能够通过在相同的室主体中进行测试和蚀刻操作来提高空间效率和制造效率，以及包括其的基板处理设备，所述多功能设备包括具有 基板在其一侧注入基板的入口和基板在其另一侧排出的出口; 传送单元，设置在所述室主体的内部，并用于沿着从所述入口到所述出口的方向传送所述注入的基板; 激光蚀刻单元，设置在所述转印单元的上部并用于蚀刻设置在所述转印单元上的所述基板的一部分; 以及用于测试设置在转印单元上的基板的测试单元。

公开(公告)号：US10137533B2

公开(公告)日：2018-11-27

申请号：US15156194

申请日：2016-05-16

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Sung-Hwan Kim ,  Sang-Su Kim ,  Byoung-Seong Jeong ,  Je-Hyun Song ,  Tae-Hun Lee ,  Sung-Won Yang ,  Tae-Hyung Kim

IPC: C03C15/00 ,  B23K26/70 ,  H01L21/768 ,  G09G3/00 ,  B23K26/03 ,  B23K26/08 ,  B23K26/12 ,  B23K31/10 ,  H01L21/67 ,  H01L21/66 ,  H01L51/56 ,  B23K26/361 ,  B23K103/00 ,  G09G3/3208

Abstract: A multi-functional apparatus for testing and etching a substrate capable of increasing spatial efficiency and manufacturing efficiency by performing testing and etching operations in a same chamber body and a substrate processing apparatus including the same, the multi-functional apparatus including a chamber body having an entrance into which the substrate is injected in one of its sides and an exit from which the substrate is ejected in another one of its sides; a transfer unit disposed inside of the chamber body and for transferring the injected substrate in a direction from the entrance to the exit; a laser etching unit disposed on an upper portion of the transfer unit and for etching a part of the substrate disposed on the transfer unit; and a testing unit for testing the substrate disposed on the transfer unit.

公开(公告)号：US20160256960A1

公开(公告)日：2016-09-08

申请号：US15156194

申请日：2016-05-16

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Sung-Hwan Kim ,  Sang-Su Kim ,  Byoung-Seong Jeong ,  Je-Hyun Song ,  Tae-Hun Lee ,  Sung-Won Yang ,  Tae-Hyung Kim

IPC: B23K26/70 ,  H01L21/67 ,  B23K31/10 ,  B23K26/08 ,  B23K26/12 ,  H01L51/56 ,  H01L21/66

CPC classification number: B23K26/70 ,  B23K26/032 ,  B23K26/0823 ,  B23K26/083 ,  B23K26/0876 ,  B23K26/123 ,  B23K26/361 ,  B23K31/10 ,  B23K2103/30 ,  B23K2103/50 ,  G09G3/006 ,  G09G3/3208 ,  H01L21/67069 ,  H01L21/76894 ,  H01L22/12 ,  H01L51/56

Abstract: A multi-functional apparatus for testing and etching a substrate capable of increasing spatial efficiency and manufacturing efficiency by performing testing and etching operations in a same chamber body and a substrate processing apparatus including the same, the multi-functional apparatus including a chamber body having an entrance into which the substrate is injected in one of its sides and an exit from which the substrate is ejected in another one of its sides; a transfer unit disposed inside of the chamber body and for transferring the injected substrate in a direction from the entrance to the exit; a laser etching unit disposed on an upper portion of the transfer unit and for etching a part of the substrate disposed on the transfer unit; and a testing unit for testing the substrate disposed on the transfer unit.

Abstract translation: 一种用于测试和蚀刻基板的多功能设备，其能够通过在相同的室主体中进行测试和蚀刻操作来提高空间效率和制造效率，以及包括其的基板处理设备，所述多功能设备包括具有 基板在其一侧注入基板的入口和基板在其另一侧排出的出口; 传送单元，设置在所述室主体的内部，并用于沿着从所述入口到所述出口的方向传送所述注入的基板; 激光蚀刻单元，设置在所述转印单元的上部并用于蚀刻设置在所述转印单元上的所述基板的一部分; 以及用于测试设置在转印单元上的基板的测试单元。

公开(公告)号：US09048460B2

公开(公告)日：2015-06-02

申请号：US14044512

申请日：2013-10-02

Applicant: Samsung Display Co., Ltd.

Inventor： Tae-Hun Lee ,  Byoung-Seong Jeong ,  Sang-Su Kim ,  Eun-Gook Sung ,  Sung-Hwan Kim ,  Sung-Won Yang ,  Je-Hyun Song ,  Tae-Hyung Kim

IPC: H01L35/24 ,  H01L51/00 ,  H01L51/56 ,  C23C14/24 ,  C23C14/50 ,  C23C14/54 ,  C23C14/56 ,  H01L51/52

CPC classification number: H01L51/56 ,  C23C14/24 ,  C23C14/243 ,  C23C14/50 ,  C23C14/546 ,  C23C14/568 ,  H01L51/52

Abstract: A deposition apparatus is capable of checking, in real time, the thickness or uniformity of a thin layer which is formed. The deposition apparatus includes a moving unit to which a substrate is detachably fixed. A conveyer unit conveys the moving unit in a first direction or in an opposite direction to the first direction. A deposition unit includes at least one deposition assembly for depositing a deposition material on the substrate. A discharge data acquisition unit acquires data associated with the amount of the deposition material discharged per unit time from the at least one deposition assembly. A transmission unit transmits the data acquired by the discharge data acquisition unit.

Abstract translation: 沉积装置能够实时检查形成的薄层的厚度或均匀性。 沉积设备包括可拆卸地固定基板的移动单元。 输送单元沿第一方向或与第一方向相反的方向输送移动单元。 沉积单元包括至少一个用于在基底上沉积沉积材料的沉积组件。 放电数据获取单元从至少一个沉积组件获取与每单位时间排出的沉积材料的量相关联的数据。 发送单元发送由排出数据获取单元获取的数据。