公开(公告)号：US08981293B2

公开(公告)日：2015-03-17

申请号：US14199906

申请日：2014-03-06

Applicant: Samsung Display Co., Ltd.

Inventor： Dong-Hyun Gong ,  Young-Gil Park ,  Jae-Kwon Lee ,  Jung-Un Kim ,  Do-Soon Jung ,  Hyun-Jung Kim ,  Geum-Tae Kim

IPC: H01J37/28 ,  H01J37/301 ,  H01J37/26 ,  G01N21/88

CPC classification number: G01N21/88 ,  G01N21/95 ,  G01N2021/9513 ,  G01N2223/418 ,  H01J37/28 ,  H01J2237/2605 ,  H01J2237/2811

Abstract: An inspection system includes: an automated optical inspection device detecting a defect of an inspection object by using a light; a scanning electron microscope device for inspecting the defect of the inspection object by using an electron beam and including a vacuum chamber; a stage positioned below and spaced from the scanning electron microscope device and supporting the inspection object; and a transferring device connected to the scanning electron microscope chamber and the automated optical inspection and transferring the scanning electron microscope device and the automated optical inspection device to positions over the stage. Air is in a gap between the chamber and the inspection object. Accordingly, an inspection object of a large size may be inspected for analysis without damage to the inspection object.

Abstract translation: 检查系统包括：通过使用光检测检查对象的缺陷的自动光学检查装置; 用于通过使用电子束并包括真空室来检查检查对象的缺陷的扫描电子显微镜装置; 位于扫描电子显微镜装置下方并与扫描电子显微镜装置隔开并支撑检查对象的台阶; 以及连接到扫描电子显微镜室的转移装置以及扫描电子显微镜装置和自动光学检查装置的自动光学检查和转移到载物台上的位置。 空气处于室和检查对象之间的间隙。 因此，可以对大尺寸的检查对象进行检查，而不会损害检查对象。

公开(公告)号：US08890067B2

公开(公告)日：2014-11-18

申请号：US13905623

申请日：2013-05-30

Applicant: Samsung Display Co., Ltd.

Inventor： Young-Gil Park ,  Won-Bong Baek ,  Ki-Won Oh

IPC: H01J37/26 ,  H01J37/18 ,  H01J37/28 ,  H01J37/20

CPC classification number: H01J37/26 ,  H01J37/185 ,  H01J37/20 ,  H01J37/28 ,  H01J2237/24592 ,  H01J2237/2605

Abstract: An inspection system using a scanning electron microscope includes a scanning electron microscope chamber inspecting an object to be inspected by using an electron beam and maintaining a vacuum condition, a stage positioned below the scanning electron microscope chamber to be separated therefrom and mounted with the object to be inspected, and a transverse guide transferring the scanning electron microscope chamber on the stage. Atmospheric conditions are maintained between the scanning electron microscope chamber and the object to be inspected. Accordingly, object to be inspected a large size of an object to be inspected may be inspected without damage to the object to be inspected such that a cost reduction and a yield improvement may be realized.

Abstract translation: 使用扫描电子显微镜的检查系统包括扫描电子显微镜室，通过使用电子束检查待检查物体并保持真空状态，将位于扫描电子显微镜室下方的台与其分离并安装在该物体上 被检查，横向引导件将扫描电子显微镜室转移到平台上。 在扫描电子显微镜室和被检查物体之间保持大气条件。 因此，可以检查被检查物体的大小，而不会损害被检查物体，从而可以实现成本降低和产量提高。