公开(公告)号：US11807932B2

公开(公告)日：2023-11-07

申请号：US17197300

申请日：2021-03-10

Applicant: Samsung Display Co., Ltd.

Inventor： Junho Jo ,  Youngho Park ,  Seungyong Song ,  Youngchul Lee ,  Youngsuck Choi

IPC: C23C14/04

CPC classification number: C23C14/042

Abstract: A method for manufacturing a mask includes providing, on a stage, a mask frame in which a plurality of cell openings is defined; providing each of the cell openings with a cell mask material in which a second area and a plurality of first areas are defined, where the second area is disposed around each of the first areas; emitting a laser beam to the second area to harden the second area; and removing the first areas, thereby forming a plurality of cell masks disposed in the cell openings, respectively.

公开(公告)号：US11619885B2

公开(公告)日：2023-04-04

申请号：US17677188

申请日：2022-02-22

Applicant: Samsung Display Co., Ltd.

Inventor： Junho Jo ,  Youngho Park ,  Seungyong Song ,  Youngchul Lee ,  Youngsuck Choi

IPC: G03F7/20

Abstract: A mask chuck may include a base plate including a central region and an edge region surrounding the central region, a head part including a first surface connected to the edge region of the base plate and configured to move on the edge region to be close to the central region or away from the central region, and a pad part disposed on a second surface of the head part opposite to the first surface of the head part. The edge region may include a first edge region extending in a first direction, a second edge region extending in the first direction and spaced apart from the first edge region in a second direction crossing the first direction, a third edge region extending in the second direction, and a fourth edge region extending in the second direction and spaced apart from the third edge region in the first direction.

公开(公告)号：US11776972B2

公开(公告)日：2023-10-03

申请号：US17097388

申请日：2020-11-13

Applicant: Samsung Display Co., Ltd.

Inventor： Junho Jo ,  Seungwon Kim ,  Youngho Park ,  Youngchul Lee

IPC: H01L27/12 ,  C23C14/54 ,  C23C14/04

CPC classification number: H01L27/1288 ,  C23C14/042 ,  C23C14/54 ,  H01L27/1285

Abstract: An apparatus and a method for manufacturing a mask assembly and a method of manufacturing a display device are provided. The apparatus may include: a tensioning part configured to be spaced apart from a mask frame comprising at least one opening, the tensioning part configured to tension a mask sheet in at least one of a first direction and a second direction, the mask sheet comprising a cell area corresponding to the at least one opening, and a dummy portion arranged outside the cell area; a pressing part configured to correspond to the dummy portion and press the dummy portion in a third direction intersecting a plane in which the first direction and the second direction extend; and a header configured to irradiate a laser beam toward the mask sheet to fix the mask sheet to the mask frame.

公开(公告)号：US11306386B2

公开(公告)日：2022-04-19

申请号：US16545173

申请日：2019-08-20

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Youngmin Moon ,  Sungsoon Im ,  Jungwoo Ko ,  Sangmin Lee ,  Youngchul Lee ,  Kyuhwan Hwang

IPC: B23K26/03 ,  C23C14/04 ,  B23K26/066 ,  C23C16/04 ,  B23K26/362

Abstract: A mask repairing apparatus may include a stage, a stereoscopic imaging unit to measure a stereoscopic image of a mask on the stage, a control unit to compare the stereoscopic image with a normal image of the mask and to produce a defect image of the mask, and a laser unit to irradiate a laser beam onto a deficient part of the mask, under control of the control unit. The control unit may control the laser unit, based on the defect image, such that the laser beam is sequentially irradiated onto m multiple layers of the deficient part while repeatedly moving in a first direction and a second direction crossing each other.

公开(公告)号：US11287749B2

公开(公告)日：2022-03-29

申请号：US17198469

申请日：2021-03-11

Applicant: Samsung Display Co., Ltd.

Inventor： Junho Jo ,  Youngho Park ,  Seungyong Song ,  Youngchul Lee ,  Youngsuck Choi

IPC: G03F7/20

Abstract: A mask chuck may include a base plate including a central region and an edge region surrounding the central region, a head part including a first surface connected to the edge region of the base plate and configured to move on the edge region to be close to the central region or away from the central region, and a pad part disposed on a second surface of the head part opposite to the first surface of the head part. The edge region may include a first edge region extending in a first direction, a second edge region extending in the first direction and spaced apart from the first edge region in a second direction crossing the first direction, a third edge region extending in the second direction, and a fourth edge region extending in the second direction and spaced apart from the third edge region in the first direction.

公开(公告)号：US20210343760A1

公开(公告)日：2021-11-04

申请号：US17097388

申请日：2020-11-13

Applicant: Samsung Display Co., Ltd.

Inventor： Junho Jo ,  Seungwon Kim ,  Youngho Park ,  Youngchul Lee

IPC: H01L27/12 ,  C23C14/04 ,  C23C14/54

Abstract: An apparatus and a method for manufacturing a mask assembly and a method of manufacturing a display device are provided. The apparatus may include: a tensioning part configured to be spaced apart from a mask frame comprising at least one opening, the tensioning part configured to tension a mask sheet in at least one of a first direction and a second direction, the mask sheet comprising a cell area corresponding to the at least one opening, and a dummy portion arranged outside the cell area; a pressing part configured to correspond to the dummy portion and press the dummy portion in a third direction intersecting a plane in which the first direction and the second direction extend; and a header configured to irradiate a laser beam toward the mask sheet to fix the mask sheet to the mask frame.