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公开(公告)号:US11050404B2
公开(公告)日:2021-06-29
申请号:US16411273
申请日:2019-05-14
Applicant: Samsung Electro-Mechanics Co., Ltd.
Inventor: Tae Kyung Lee , Yoon Sok Park , Dae Hun Jeong
Abstract: A bulk-acoustic wave resonator includes: a first substrate formed of a first material; an insulating layer or a piezoelectric layer disposed on a first side of the first substrate; and a second substrate formed of a second material and disposed on a second side of the first substrate, wherein the second material has thermal conductivity that is higher than a thermal conductivity of the first material.
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公开(公告)号:US10812040B2
公开(公告)日:2020-10-20
申请号:US16356223
申请日:2019-03-18
Applicant: Samsung Electro-Mechanics Co., Ltd.
Inventor: Yoon Sok Park , Won Kyu Jeung , Tah Joon Park , Dae Hun Jeong , Sang Uk Son
Abstract: An acoustic wave filter device includes resonance portions, first and second metal pads. The resonance portions each includes a lower electrode disposed on a substrate, a piezoelectric layer disposed on at least a portion of the lower electrode, and an upper electrode disposed on at least a portion of the piezoelectric layer. The first metal pads are connected to one of the upper electrode and the lower electrode of a corresponding resonance portion among the resonance portions. The second metal pads are disposed outwardly of an active region and connected to the other one of the upper electrode and the lower electrode of adjacent resonant portions among the resonance portions. A ring portion is disposed outwardly of the active region in which the lower electrode, the piezoelectric layer, and the upper electrode overlap is disposed only on a portion of any one of the first and second metal pads.
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公开(公告)号:US10547282B2
公开(公告)日:2020-01-28
申请号:US15704162
申请日:2017-09-14
Applicant: SAMSUNG ELECTRO-MECHANICS CO., LTD.
Inventor: Jung Woo Sung , Yoon Sok Park , Won Kyu Jeung
IPC: H03H9/10 , B81B7/00 , B81C1/00 , H01L21/768 , H03H9/05
Abstract: A filter includes a multilayer structure comprising films and forming bulk acoustic wave resonators, a cap accommodating the bulk acoustic wave resonators and bonded to the multilayer structure, a bonding agent disposed in a bonded area between the multilayer structure and the cap and comprising a bonding layer, and a shielding layer disposed on an inner surface of the cap and comprising a same material as at least a portion of the bonding layer.
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公开(公告)号:US11558034B2
公开(公告)日:2023-01-17
申请号:US17106415
申请日:2020-11-30
Applicant: Samsung Electro-Mechanics Co., Ltd.
Inventor: Sung Han , Yoon Sok Park , Tae Kyung Lee , Hwa Sun Lee
Abstract: An acoustic resonator filter is provided. The acoustic resonator filter includes a rear filter electrically connected between a front port and a rear port, through which a radio frequency (RF) signal passes, the rear filter including at least one film bulk acoustic resonator (FBAR); and a front filter electrically connected between the front port and the rear filter and including at least one solidly mounted resonator (SMR).
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公开(公告)号:US10965272B2
公开(公告)日:2021-03-30
申请号:US16281959
申请日:2019-02-21
Applicant: SAMSUNG ELECTRO-MECHANICS CO., LTD.
Inventor: Hyun Jun Kim , Yoon Sok Park , Sung Tae Kim
Abstract: A filter comprises a series unit comprising a plurality of series resonators, a shunt unit comprising a plurality of shunt resonators, connected between the plurality of series resonators and a ground, and a correction unit comprising an inductor unit connected between both ends of at least one of a set of series resonators of the plurality of series resonators and a set of shunt resonators of the plurality of shunt resonators, and an impedance unit connected between the inductor unit and a ground.
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公开(公告)号:US10862457B2
公开(公告)日:2020-12-08
申请号:US16294048
申请日:2019-03-06
Applicant: Samsung Electro-Mechanics Co., Ltd.
Inventor: Yoon Sok Park , Hyun Jun Kim , Sung Tae Kim , Won Kyu Jeung
Abstract: A filter includes: a series part disposed between a signal input terminal and a signal output terminal, and including at least one first bulk-acoustic resonator; an inductor portion including a first inductor disposed between ends of the series part and a second inductor having a first end connected to a connection node of the series part and the first inductor; and a shunt part disposed between a second end of the second inductor and a ground, and including at least one second bulk-acoustic resonator, wherein a resonant frequency of the at least one second bulk-acoustic resonator is higher than a resonant frequency of the at least one first bulk-acoustic resonator.
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公开(公告)号:US10594293B2
公开(公告)日:2020-03-17
申请号:US15712758
申请日:2017-09-22
Applicant: SAMSUNG ELECTRO-MECHANICS CO., LTD.
Inventor: Yoon Sok Park , Jung Woo Sung , Won Kyu Jeung
Abstract: A filter includes a multilayer structure having films configured as bulk acoustic wave resonators; a wiring line connected to the bulk acoustic wave resonators; a cap coupled to the multilayer structure on a bonding line; and the filtering characteristics of the filter being configured through a mutual inductance between the wiring line and the bonding line.
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公开(公告)号:US10547285B2
公开(公告)日:2020-01-28
申请号:US15809696
申请日:2017-11-10
Applicant: SAMSUNG ELECTRO-MECHANICS CO., LTD.
Inventor: Chang Hyun Lim , Yoon Sok Park , Jong Woon Kim , Tae Yoon Kim , Moon Chul Lee
Abstract: A bulk acoustic wave resonator includes a substrate including a cavity groove, a membrane layer disposed above the substrate and including a convex portion. And a lower electrode including a portion thereof disposed on the convex portion. The bulk acoustic wave resonator also includes a piezoelectric layer configured so that a portion of the piezoelectric layer is disposed above the convex portion, and an upper electrode disposed on the piezoelectric layer. A first space formed by the cavity groove and a second space formed by the convex portion form a cavity, the cavity groove is disposed below an active region, and the convex portion comprises an inclined surface disposed outside of the cavity groove.
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公开(公告)号:US20180309428A1
公开(公告)日:2018-10-25
申请号:US15809696
申请日:2017-11-10
Applicant: SAMSUNG ELECTRO-MECHANICS CO., LTD.
Inventor: Chang Hyun Lim , Yoon Sok Park , Jong Woon Kim , Tae Yoon Kim , Moon Chul Lee
Abstract: A bulk acoustic wave resonator includes a substrate including a cavity groove, a membrane layer disposed above the substrate and including a convex portion. And a lower electrode including a portion thereof disposed on the convex portion. The bulk acoustic wave resonator also includes a piezoelectric layer configured so that a portion of the piezoelectric layer is disposed above the convex portion, and an upper electrode disposed on the piezoelectric layer. A first space formed by the cavity groove and a second space formed by the convex portion form a cavity, the cavity groove is disposed below an active region, and the convex portion comprises an inclined surface disposed outside of the cavity groove.
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公开(公告)号:US20150041930A1
公开(公告)日:2015-02-12
申请号:US14080239
申请日:2013-11-14
Applicant: SAMSUNG ELECTRO-MECHANICS CO., LTD.
Inventor: Jong Beom Kim , Yoon Sok Park , Jung Won Lee , Hyun Ho Lim , Byeong Sung Min
CPC classification number: H04R19/005 , B81B2201/0257 , B81B2203/0127 , B81B2203/0307 , B81C1/00039 , H04R19/04 , H04R31/00 , H04R2201/003
Abstract: There is provided an acoustic transducer including: a substrate formed to have a hollow part through which acoustic waves are input; a diaphragm formed on the substrate and covering the hollow part; and a back plate disposed so as to cover at least a portion of the diaphragm, wherein a ring-shaped groove extended along an edge of the diaphragm is formed in the substrate.
Abstract translation: 提供了一种声换能器,包括:形成为具有输入声波的中空部分的基板; 形成在所述基板上并覆盖所述中空部的隔膜; 以及设置成覆盖所述隔膜的至少一部分的背板,其中沿所述隔膜的边缘延伸的环形槽形成在所述基板中。
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