Bulk-acoustic wave resonator
    1.
    发明授权

    公开(公告)号:US11050404B2

    公开(公告)日:2021-06-29

    申请号:US16411273

    申请日:2019-05-14

    Abstract: A bulk-acoustic wave resonator includes: a first substrate formed of a first material; an insulating layer or a piezoelectric layer disposed on a first side of the first substrate; and a second substrate formed of a second material and disposed on a second side of the first substrate, wherein the second material has thermal conductivity that is higher than a thermal conductivity of the first material.

    Acoustic wave filter device
    2.
    发明授权

    公开(公告)号:US10812040B2

    公开(公告)日:2020-10-20

    申请号:US16356223

    申请日:2019-03-18

    Abstract: An acoustic wave filter device includes resonance portions, first and second metal pads. The resonance portions each includes a lower electrode disposed on a substrate, a piezoelectric layer disposed on at least a portion of the lower electrode, and an upper electrode disposed on at least a portion of the piezoelectric layer. The first metal pads are connected to one of the upper electrode and the lower electrode of a corresponding resonance portion among the resonance portions. The second metal pads are disposed outwardly of an active region and connected to the other one of the upper electrode and the lower electrode of adjacent resonant portions among the resonance portions. A ring portion is disposed outwardly of the active region in which the lower electrode, the piezoelectric layer, and the upper electrode overlap is disposed only on a portion of any one of the first and second metal pads.

    Acoustic resonator filter
    4.
    发明授权

    公开(公告)号:US11558034B2

    公开(公告)日:2023-01-17

    申请号:US17106415

    申请日:2020-11-30

    Abstract: An acoustic resonator filter is provided. The acoustic resonator filter includes a rear filter electrically connected between a front port and a rear port, through which a radio frequency (RF) signal passes, the rear filter including at least one film bulk acoustic resonator (FBAR); and a front filter electrically connected between the front port and the rear filter and including at least one solidly mounted resonator (SMR).

    Filter with antiresonance frequency correction

    公开(公告)号:US10965272B2

    公开(公告)日:2021-03-30

    申请号:US16281959

    申请日:2019-02-21

    Abstract: A filter comprises a series unit comprising a plurality of series resonators, a shunt unit comprising a plurality of shunt resonators, connected between the plurality of series resonators and a ground, and a correction unit comprising an inductor unit connected between both ends of at least one of a set of series resonators of the plurality of series resonators and a set of shunt resonators of the plurality of shunt resonators, and an impedance unit connected between the inductor unit and a ground.

    Filter
    6.
    发明授权
    Filter 有权

    公开(公告)号:US10862457B2

    公开(公告)日:2020-12-08

    申请号:US16294048

    申请日:2019-03-06

    Abstract: A filter includes: a series part disposed between a signal input terminal and a signal output terminal, and including at least one first bulk-acoustic resonator; an inductor portion including a first inductor disposed between ends of the series part and a second inductor having a first end connected to a connection node of the series part and the first inductor; and a shunt part disposed between a second end of the second inductor and a ground, and including at least one second bulk-acoustic resonator, wherein a resonant frequency of the at least one second bulk-acoustic resonator is higher than a resonant frequency of the at least one first bulk-acoustic resonator.

    Bulk acoustic wave resonator and method of manufacturing the same

    公开(公告)号:US10547285B2

    公开(公告)日:2020-01-28

    申请号:US15809696

    申请日:2017-11-10

    Abstract: A bulk acoustic wave resonator includes a substrate including a cavity groove, a membrane layer disposed above the substrate and including a convex portion. And a lower electrode including a portion thereof disposed on the convex portion. The bulk acoustic wave resonator also includes a piezoelectric layer configured so that a portion of the piezoelectric layer is disposed above the convex portion, and an upper electrode disposed on the piezoelectric layer. A first space formed by the cavity groove and a second space formed by the convex portion form a cavity, the cavity groove is disposed below an active region, and the convex portion comprises an inclined surface disposed outside of the cavity groove.

    BULK ACOUSTIC WAVE RESONATOR AND METHOD OF MANUFACTURING THE SAME

    公开(公告)号:US20180309428A1

    公开(公告)日:2018-10-25

    申请号:US15809696

    申请日:2017-11-10

    Abstract: A bulk acoustic wave resonator includes a substrate including a cavity groove, a membrane layer disposed above the substrate and including a convex portion. And a lower electrode including a portion thereof disposed on the convex portion. The bulk acoustic wave resonator also includes a piezoelectric layer configured so that a portion of the piezoelectric layer is disposed above the convex portion, and an upper electrode disposed on the piezoelectric layer. A first space formed by the cavity groove and a second space formed by the convex portion form a cavity, the cavity groove is disposed below an active region, and the convex portion comprises an inclined surface disposed outside of the cavity groove.

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