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公开(公告)号：US20230400404A1
公开(公告)日：2023-12-14
申请号：US18154990
申请日：2023-01-16
Applicant: Samsung Electronics Co., Ltd.
Inventor： Garam Choi , Wookrae Kim , Jinseob Kim , Jinyong Kim , Sungho Jang , Daehoon Han
CPC classification number: G01N21/21 , G01B11/24 , G01B2210/56
Abstract: A semiconductor measurement apparatus includes an illumination unit including a light source and at least one illumination polarization element, a light receiving unit including at least one light-receiving polarization element disposed on a path of light reflected by a sample, and an image sensor positioned to receive light passing through the at least one light-receiving polarization element and configured to output an original image, and a control unit configured to determine, by processing the original image, a selected critical dimension among critical dimensions of a structure included in a region of the sample. The control unit is configured to obtain a plurality of sample images by selecting regions of the original image in which a peak due to interference appears, to determine a plurality of elements included in a Mueller matrix using the plurality of sample images, and to determine the selected critical dimension based on the plurality of elements.
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公开(公告)号：US20250012556A1
公开(公告)日：2025-01-09
申请号：US18403801
申请日：2024-01-04
Applicant: Samsung Electronics Co., Ltd.
Inventor： Younguk Jin , Wookrae Kim , Jinseob Kim , Jinyong Kim , Garam Choi , Daehoon Han
IPC: G01B9/02 , G01B9/02001 , G01B9/02056
Abstract: A semiconductor measurement apparatus includes lighting unit; a light receiving unit; and a control unit configured to: generate a prediction equation representing the original image, where the prediction equation is based on a plurality of elements of a Mueller matrix, approximate each of the plurality of elements of the Mueller matrix to a polynomial including bases of a Zernike polynomial and coefficients, generate optimization coefficients based on a sum of the coefficients and a difference between the prediction equation and the original image, determine whether an optimization condition is satisfied based on the optimization coefficients and a minimum value, and select a dimension based on the optimization coefficients and the bases when the optimization condition is satisfied.
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公开(公告)号：US20220170792A1
公开(公告)日：2022-06-02
申请号：US17365592
申请日：2021-07-01
Applicant: Samsung Electronics Co., Ltd.
Inventor： Sungho Jang , Jungchul Lee , Jinseob Kim , Gwangsik Park , Minhwan Seo , Janghwi Lee , Wondon Joo , Jiyoung Chu , Daehoon Han
Abstract: Provided is a hyperspectral imaging (HSI) apparatus. The HSI apparatus includes: a first slit plate configured to introduce an output beam; a first aspherical mirror configured to reflect the introduced output beam; a first grating having a planar reflective surface, the first grating configured to generate a plurality of first split beams by splitting the output beam after being reflected by the first aspherical mirror; and a first camera configured to detect the plurality of first split beams.
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公开(公告)号：US11898912B2
公开(公告)日：2024-02-13
申请号：US17365592
申请日：2021-07-01
Applicant: Samsung Electronics Co., Ltd.
Inventor： Sungho Jang , Jungchul Lee , Jinseob Kim , Gwangsik Park , Minhwan Seo , Janghwi Lee , Wondon Joo , Jiyoung Chu , Daehoon Han
CPC classification number: G01J3/2823 , G01J3/021 , G01J3/04 , G01J3/24 , G01J2003/2826
Abstract: Provided is a hyperspectral imaging (HSI) apparatus. The HSI apparatus includes: a first slit plate configured to introduce an output beam; a first aspherical mirror configured to reflect the introduced output beam; a first grating having a planar reflective surface, the first grating configured to generate a plurality of first split beams by splitting the output beam after being reflected by the first aspherical mirror; and a first camera configured to detect the plurality of first split beams.
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