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    Spectrometer, metrology system, and semiconductor inspection method
    4.
    发明授权
    Spectrometer, metrology system, and semiconductor inspection method 有权

    公开(公告)号：US12188818B2

    公开(公告)日：2025-01-07

    申请号：US17827051

    申请日：2022-05-27

    Applicant: Samsung Electronics Co., Ltd.

    Inventor： Hidaka Yasuhiro ,  Jinyong Kim

    IPC: G01J3/02 ,  G01J3/28 ,  H01L21/66

    Abstract: A spectrometer and a metrology system capable of improving spectral performance are provided. The spectrometer includes a collimator lens, a focusing lens, and a spatial light modulator (SLM), wherein light reflected by the SLM is output from an output slit through the focusing lens and a dispersive optical element, and on a second plane perpendicular to a first plane including optical paths of pieces of light dispersed at different angles, an incident slit, the output slit, and a reflective plane have a conjugate relationship.

    SEMICONDUCTOR MEASUREMENT APPARATUS
    5.
    发明公开
    SEMICONDUCTOR MEASUREMENT APPARATUS 审中-公开

    公开(公告)号：US20230400404A1

    公开(公告)日：2023-12-14

    申请号：US18154990

    申请日：2023-01-16

    Applicant: Samsung Electronics Co., Ltd.

    Inventor： Garam Choi ,  Wookrae Kim ,  Jinseob Kim ,  Jinyong Kim ,  Sungho Jang ,  Daehoon Han

    IPC: G01N21/21 ,  G01B11/24

    CPC classification number: G01N21/21 ,  G01B11/24 ,  G01B2210/56

    Abstract: A semiconductor measurement apparatus includes an illumination unit including a light source and at least one illumination polarization element, a light receiving unit including at least one light-receiving polarization element disposed on a path of light reflected by a sample, and an image sensor positioned to receive light passing through the at least one light-receiving polarization element and configured to output an original image, and a control unit configured to determine, by processing the original image, a selected critical dimension among critical dimensions of a structure included in a region of the sample. The control unit is configured to obtain a plurality of sample images by selecting regions of the original image in which a peak due to interference appears, to determine a plurality of elements included in a Mueller matrix using the plurality of sample images, and to determine the selected critical dimension based on the plurality of elements.

    SEMICONDUCTOR MEASUREMENT APPARATUS
    9.
    发明申请
    SEMICONDUCTOR MEASUREMENT APPARATUS 有权

    公开(公告)号：US20250012556A1

    公开(公告)日：2025-01-09

    申请号：US18403801

    申请日：2024-01-04

    Applicant: Samsung Electronics Co., Ltd.

    Inventor： Younguk Jin ,  Wookrae Kim ,  Jinseob Kim ,  Jinyong Kim ,  Garam Choi ,  Daehoon Han

    IPC: G01B9/02 ,  G01B9/02001 ,  G01B9/02056

    Abstract: A semiconductor measurement apparatus includes lighting unit; a light receiving unit; and a control unit configured to: generate a prediction equation representing the original image, where the prediction equation is based on a plurality of elements of a Mueller matrix, approximate each of the plurality of elements of the Mueller matrix to a polynomial including bases of a Zernike polynomial and coefficients, generate optimization coefficients based on a sum of the coefficients and a difference between the prediction equation and the original image, determine whether an optimization condition is satisfied based on the optimization coefficients and a minimum value, and select a dimension based on the optimization coefficients and the bases when the optimization condition is satisfied.

    Wearable device and method for controlling audio output using multi digital to analog converter path
    10.
    发明授权
    Wearable device and method for controlling audio output using multi digital to analog converter path 有权

    公开(公告)号：US12126975B2

    公开(公告)日：2024-10-22

    申请号：US17842044

    申请日：2022-06-16

    Applicant: Samsung Electronics Co., Ltd.

    Inventor： Yonghoon Lee ,  Jinyong Kim ,  Kyoungho Bang ,  Byeongmin Lee ,  Jeock Lee ,  Hangil Moon

    IPC: H04R3/12 ,  G10K11/178 ,  H04S3/00

    CPC classification number: H04R3/12 ,  G10K11/17823 ,  H04S3/008 ,  H04R2205/022

    Abstract: A wearable device is provided and includes a plurality of speakers including a first speaker, a second speaker, and an Nth speaker, a plurality of digital to analog converter (DAC)s including a first DAC connected to the first speaker, a second DAC connected to the second speaker, and an Nth DAC connected to the Nth speaker, an audio signal processing module including N DAC output paths configured to filter an audio signal according to each frequency band and output the audio signal, a memory; and a processor electrically connected to the plurality of DACs, the audio signal processing module, and the memory, wherein the memory includes instructions causing the processor to, when the audio signal is reproduced, analyze a frequency component included in the audio signal, activate the N DAC output paths when the frequency component included in the audio signal has a full band range, activate only a DAC output path for processing a specific frequency band among the N DAC output paths when the frequency component included in the audio signal has only the specific frequency band, and output the audio signal through a speaker connected to the activated DAC output path.

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