公开(公告)号：US20230196545A1

公开(公告)日：2023-06-22

申请号：US17849617

申请日：2022-06-25

Applicant: Samsung Electronics Co., Ltd.

Inventor： Hyeok Lee ,  Jaewon Yang ,  Sangchul Yeo ,  Eunju Kim ,  Sooryong Lee

IPC: G06T7/00 ,  G06V10/46 ,  G06V10/10 ,  G06F30/27

CPC classification number: G06T7/0006 ,  G06V10/46 ,  G06V10/10 ,  G06F30/27 ,  G06T2207/20081 ,  G06T2207/30148

Abstract: An operating method of a computing device for predicting a profile using deep learning includes sampling a unique pattern in a full chip, extracting a contour of a resist profile of each of a plurality of heights by performing rigorous simulation corresponding to the unique pattern, preparing an input image and an output image corresponding to the contour of each of the plurality of heights, performing deep learning on the extracted contour using the input image and the output image, and generating a profile prediction model according to performing of the deep leaning.

公开(公告)号：US12299869B2

公开(公告)日：2025-05-13

申请号：US17849617

申请日：2022-06-25

Applicant: Samsung Electronics Co., Ltd.

Inventor： Hyeok Lee ,  Jaewon Yang ,  Sangchul Yeo ,  Eunju Kim ,  Sooryong Lee

IPC: G06T19/00 ,  A61B6/00 ,  A61B6/02 ,  G06F3/04815 ,  G06F3/04842 ,  G06F30/27 ,  G06T7/00 ,  G06V10/10 ,  G06V10/46

Abstract: An operating method of a computing device for predicting a profile using deep learning includes sampling a unique pattern in a full chip, extracting a contour of a resist profile of each of a plurality of heights by performing rigorous simulation corresponding to the unique pattern, preparing an input image and an output image corresponding to the contour of each of the plurality of heights, performing deep learning on the extracted contour using the input image and the output image, and generating a profile prediction model according to performing of the deep leaning.