公开(公告)号：US11462410B2

公开(公告)日：2022-10-04

申请号：US16845959

申请日：2020-04-10

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Nohsung Kwak ,  Euijin Seo ,  Jonghwi Seo ,  Jaehee Lee ,  Ilyoung Han ,  Guesuk Lee

IPC: H01L21/20 ,  H01L21/268 ,  B23K26/066 ,  B23K26/352

Abstract: A semiconductor manufacturing apparatus is provided including a beam shaper arranged on a light path of a laser beam and including a plurality of mask modules. The plurality of mask modules defines a light blocking region and a light transmitting region. At least one mask module of the plurality of mask modules includes a blocking plate configured to block a portion of the laser beam, and a driver is configured to move the blocking plate.

公开(公告)号：US11605551B2

公开(公告)日：2023-03-14

申请号：US17408437

申请日：2021-08-22

Applicant: Samsung Electronics Co., Ltd.

Inventor： Youngjae Son ,  Guesuk Lee ,  Taemin Earmme ,  Hyeongyun Lee ,  Seungchul Han

IPC: H01L21/683 ,  H01L21/67

Abstract: Disclosed are chuck assemblies, semiconductor device fabricating apparatuses, and methods of fabricating semiconductor devices. The chuck assembly comprises a chuck base including lower and upper bases, a ceramic plate on the upper base, an edge ring that surrounds the ceramic plate, a ground ring that surrounds an outer sidewall of the edge ring on an edge portion of the lower base, a coupling ring between the ground ring and the upper base and between the edge ring and the edge portion of the lower base, an upper heat sink between the coupling ring and the edge ring, and a sidewall heat sink between the coupling ring and the ground ring and between the coupling ring and the upper base.

公开(公告)号：US20210082704A1

公开(公告)日：2021-03-18

申请号：US16845959

申请日：2020-04-10

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Nohsung Kwak ,  Euijin Seo ,  Jonghwi Seo ,  Jaehee Lee ,  Ilyoung Han ,  Guesuk Lee

IPC: H01L21/268 ,  B23K26/352 ,  B23K26/066

Abstract: A semiconductor manufacturing apparatus is provided including a beam shaper arranged on a light path of a laser beam and including a plurality of mask modules. The plurality of mask modules defines a light blocking region and a light transmitting region. At least one mask module of the plurality of mask modules includes a blocking plate configured to block a portion of the laser beam, and a driver is configured to move the blocking plate.