STORAGE DEVICE, METHOD OF OPERATING THE SAME, AND METHOD OF PROVIDING A PLURALITY OF PERFORMANCE TABLES

    公开(公告)号:US20220334940A1

    公开(公告)日:2022-10-20

    申请号:US17510634

    申请日:2021-10-26

    Abstract: A storage device includes at least one non-volatile memory device, a first temperature sensor and a second temperature sensor arranged adjacent to the at least one non-volatile memory device, and a controller controlling an operation performance level of the at least one non-volatile memory device based on a plurality of performance tables, a first temperature detected by the first temperature sensor, and a second temperature detected by the second temperature sensor. Each performance table includes a plurality of entries, and each entry includes information regarding the operation performance level of the at least one non-volatile memory device. Each performance table corresponds to a result of a calculation regarding the first temperature and the second temperature.

    Shower head assembly and plasma processing apparatus having the same

    公开(公告)号:US11488804B2

    公开(公告)日:2022-11-01

    申请号:US16665120

    申请日:2019-10-28

    Abstract: A shower head assembly for a plasma processing apparatus in which a substrate is accommodatable on a substrate stage within a chamber, a plasma processing apparatus, and a plasma processing method, the shower head assembly including a shower plate including a plurality of injection holes through which a gas is sprayable out toward the substrate; and a compensation plate on a lower surface of the shower plate and facing the substrate, the compensation plate including a first compensating portion having first gas passages of a first length and a second compensating portion having second gas passages of a second length that is greater than the first length, wherein the first gas passage and the second gas passage are respectively in fluid communication with the injection holes.

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