公开(公告)号：US20040227164A1

公开(公告)日：2004-11-18

申请号：US10823420

申请日：2004-04-13

Applicant: Samsung Electronics Co., Ltd.

Inventor： Seung-hwan Lee ,  Moon-han Park ,  Hwa-sung Rhee ,  Ho Lee ,  Jae-yoon Yoo

IPC: H01L029/74

CPC classification number: H01L29/7834 ,  H01L29/42376 ,  H01L29/66477 ,  H01L29/665 ,  H01L29/6656 ,  H01L29/66628

Abstract: In a metal-oxide semiconductor (MOS) transistor with an elevated source/drain structure and in a method of fabricating the MOS transistor with the elevated source/drain structure using a selective epitaxy growth (SEG) process, a source/drain extension junction is formed after an epi-layer is formed, thereby preventing degradation of the source/drain junction region. In addition, the source/drain extension junction is partially overlapped by a lower portion of the gate layer, since two gate spacers are formed and two elevated source/drain layers are formed in accordance with the SEG process. This mitigates the short channel effect and reduces sheet resistance in the source/drain layers and the gate layer.

Abstract translation: 在具有升高的源极/漏极结构的金属氧化物半导体（MOS）晶体管中，并且使用选择性外延生长（SEG）工艺制造具有升高的源极/漏极结构的MOS晶体管的方法中，源极/漏极延伸结是 在形成外延层之后形成，从而防止源极/漏极结区域的劣化。 此外，源极/漏极延伸结部分由栅极层的下部部分地重叠，因为形成了两个栅极间隔物，并且根据SEG工艺形成两个升高的源极/漏极层。 这减轻了短沟道效应并降低了源极/漏极层和栅极层中的薄层电阻。

公开(公告)号：US20040192001A1

公开(公告)日：2004-09-30

申请号：US10795175

申请日：2004-03-05

Applicant: Samsung Electronics Co., Ltd.

Inventor： Hwa-sung Rhee ,  Jae-yoon Yoo ,  Ho Lee ,  Seung-hwan Lee ,  Byou-ree Lim

IPC: H01L021/331

CPC classification number: H01L29/66287 ,  H01L29/0804 ,  H01L29/7375 ,  H01L29/7378

Abstract: A method of manufacturing a bipolar device including pre-treatment using germane gas and a bipolar device manufactured by the same. The method includes forming a single crystalline silicon layer for a base region on a collector region; and forming a polysilicon layer for an emitter region thereon. Here, before the polysilicon layer is formed, the single crystalline silicon layer is pre-treated using germane gas. Thus, an oxide layer is removed from the single crystalline silicon layer, and a germanium layer is formed on the single crystalline silicon layer, thus preventing Si-rearrangement.

Abstract translation: 一种制造双极器件的方法，其包括使用锗烷气体的预处理和由其制造的双极器件。 该方法包括在集电区上形成用于基区的单晶硅层; 并在其上形成发射极区的多晶硅层。 这里，在形成多晶硅层之前，使用锗烷气预处理单晶硅层。 因此，从单晶硅层去除氧化物层，并且在单晶硅层上形成锗层，从而防止Si重排。