Three-dimensional semiconductor device having contact plugs penetrating upper adjacent electrodes

    公开(公告)号:US10396035B2

    公开(公告)日:2019-08-27

    申请号:US15855289

    申请日:2017-12-27

    Inventor: Hyun-mog Park

    Abstract: A three-dimensional semiconductor device includes: a substrate having a cell array region and a contact region; a stacked structure including a plurality of electrodes and a plurality of electrode isolation insulating layers, which are alternately stacked on the substrate in a vertical direction, and having a stepwise structure on the contact region; vertical structures penetrating the stacked structure in the cell array region, each of the vertical structures constituting a cell string; and word line contact plugs, each penetrating an uppermost electrode among the plurality of electrodes in a region of each of tread portions of the stacked structure having the stepwise structure, being connected to another electrode under the penetrated uppermost electrode, and being electrically insulated from the penetrated uppermost electrode.

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