公开(公告)号：US20240279802A1

公开(公告)日：2024-08-22

申请号：US18508704

申请日：2023-11-14

Applicant: Samsung Electronics Co., Ltd.

Inventor： Jung-Min LEE ,  Gi Duck KWEON ,  Dae Ki KIM ,  Hang Kyu SONG ,  Hyun Tae YANG ,  Byoung Kwon YEO ,  Byeong Ho WOO ,  Jae Sung YU ,  Jung Bae CHOI

IPC: C23C16/44 ,  C23C16/455

CPC classification number: C23C16/4405 ,  C23C16/4408 ,  C23C16/4557

Abstract: Provided are a process chamber cleaning apparatus and method in which the inside of a process chamber may be cleaned without damaging to an inner wall or a component of the process chamber. The process chamber cleaning apparatus comprising: a chamber housing; a substrate support installed inside the chamber housing, supporting a plurality of semiconductor substrates; a gas supply providing process gases; a first gas injector installed inside the chamber housing, connected to the gas supply, injecting etch gas, which is one of the process gases, into the chamber housing; and a controller controlling operations of the gas supply and the first gas injector, wherein the first gas injector injects the etch gas in a direction twisted at a predetermined angle from a central direction of the chamber housing.

公开(公告)号：US20150287471A1

公开(公告)日：2015-10-08

申请号：US14675847

申请日：2015-04-01

Applicant: Samsung Electronics Co., Ltd.

Inventor： Jae Sung YU ,  Jung Pil LEE

IPC: G11C16/32

CPC classification number: G11C16/32 ,  G06F1/08 ,  G06F1/12 ,  G06F13/1689 ,  H03K5/05 ,  H03K5/06

Abstract: A memory controller according to an example embodiment of the present disclosure may include a duty ratio adjusting circuit which generates adjusted clock signals in response to a clock signal for strobing data, and a selection circuit which outputs one of the clock signal and the adjusted clock signals to a memory device as an output clock signal. Each of the adjusted clock signals may have a different duty ratio.

Abstract translation: 根据本公开的示例性实施例的存储器控​​制器可以包括占空比调整电路，其响应于用于选通数据的时钟信号产生调整的时钟信号，以及选择电路，其输出时钟信号和经调整的时钟信号之一 作为输出时钟信号到存储器件。 每个经调整的时钟信号可以具有不同的占空比。