公开(公告)号：US20240355848A1

公开(公告)日：2024-10-24

申请号：US18490177

申请日：2023-10-19

Applicant: Samsung Electronics Co., Ltd.

Inventor： Jinsu PARK ,  Nosan PARK ,  Jae-Kwan SEO ,  Wonchun YANG ,  Kookki LEE ,  Seul-Young JEONG

IPC: H01L27/146 ,  H04N25/13

CPC classification number: H01L27/14621 ,  H01L27/14627 ,  H01L27/14645 ,  H01L27/14685 ,  H04N25/135

Abstract: A manufacturing method of an image sensor includes inputting a substrate in an equipment, wherein a sensor array and a plurality of pads are on the substrate; forming a plurality of vortex generating patterns at regular intervals between the plurality of pads and the sensor array; and coating a photo resist while rotating the substrate based on operating the equipment.

公开(公告)号：US20230402476A1

公开(公告)日：2023-12-14

申请号：US18068723

申请日：2022-12-20

Applicant: Samsung Electronics Co., Ltd.

Inventor： Jae-Kwan SEO ,  Nosan Park ,  Jung-Kuk Park ,  Jinsu Park ,  Kookki Lee ,  Seul-Young Jeong

IPC: H01L27/146

CPC classification number: H01L27/14627 ,  H01L27/14645 ,  H01L27/14621 ,  H01L27/14685 ,  H01L27/1463 ,  H01L27/14636 ,  H01L27/1464 ,  H01L27/14634

Abstract: An image sensor includes a first substrate including pixel regions, each of the pixel regions including a photoelectric conversion region, color filters on the pixel regions, the color filters on a first surface of the first substrate, micro lenses on the color filters, and a lens coating layer on the micro lenses. The lens coating layer includes a first coating layer and a second coating layer, the second coating layer is on the first coating layer, the first and second coating layers include a same material, and a density of the second coating layer is greater than a density of the first coating layer.