公开(公告)号：US10753800B2

公开(公告)日：2020-08-25

申请号：US16238644

申请日：2019-01-03

Applicant: Samsung Electronics Co., Ltd.

Inventor： Jeong-Il Mun ,  Hyung-Joo Lee ,  Jong-Woo Sun ,  Ja-Myung Gu ,  Jae-Woong Hwang ,  Jong-Hwan An

IPC: G01J3/30 ,  G01J3/443 ,  G01N21/73 ,  G01J3/02

Abstract: A calibrator of an OES may include a cover, a reference light source and a controller. The cover may be detachably combined with a ceiling of a plasma chamber of a plasma processing apparatus. The reference light source may be installed at the cover to irradiate a reference light to the OES through an inner space of the plasma chamber. The controller may compare a spectrum of the reference light inputted into the OES with a spectrum of an actual light inputted into the OES during a plasma process in the plasma chamber to calibrate the OES. Thus, the OES may be calibrated without disassembling of the OES from the plasma chamber to decrease a time for calibrating the OES.