WAFER STORAGE SYSTEM
    3.
    发明申请

    公开(公告)号:US20230061872A1

    公开(公告)日:2023-03-02

    申请号:US17847542

    申请日:2022-06-23

    Abstract: A wafer storage system includes a main rail, an overhead hoist transport (OHT) on the main rail, the OHT being configured to transfer at least one storage case with wafers, an interface port on at least one side of the main rail, an auxiliary rail on one side of the interface port, the auxiliary rail being parallel to the main rail, and the interface port being between the main rail and the auxiliary rail, an auxiliary transport on the auxiliary rail, the auxiliary transport being configured to move along the auxiliary rail and to move the at least one storage case, a storage shelf on at least one side of the auxiliary transport, the storage shelf being configured to store the at least one storage case, and a worktable on one side of the storage shelf, the storage shelf being between the worktable and the auxiliary transport.

    ARTICLE TRANSFER AND STORAGE APPARATUS
    6.
    发明公开

    公开(公告)号:US20240253900A1

    公开(公告)日:2024-08-01

    申请号:US18529445

    申请日:2023-12-05

    CPC classification number: B65G1/0464 B65G1/1371

    Abstract: An article transfer and storage apparatus includes a travel rail that includes a plurality of first rails extending in a first direction and spaced apart from each other in a second direction perpendicular to the first direction and a plurality of second rails extending in the second direction and spaced apart from each other in the first direction, a plurality of power transmission rails disposed above the travel rail, extending in the first direction, and spaced apart from each other in the second direction, a transfer robot that is configured to move on the travel rail in the first direction and the second direction to convey an article, the transfer robot including a battery charged by power provided from the plurality of power transmission rails, and storage shelves disposed below the travel rail.

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