公开(公告)号：US20240288785A1

公开(公告)日：2024-08-29

申请号：US18585900

申请日：2024-02-23

Applicant: Samsung Electronics Co., Ltd.

Inventor： Jungah KIM ,  Jimin CHUN ,  Hyojoong YOON ,  Yonghwan CHO ,  Junyoul CHOI ,  Sangwon BAE

IPC: G03F7/00 ,  C11D7/08 ,  C11D7/10 ,  C11D7/26 ,  G03F1/22

CPC classification number: G03F7/70925 ,  C11D7/08 ,  C11D7/105 ,  C11D7/265 ,  G03F1/22 ,  G03F7/70033

Abstract: Described is a cleaning composition including an inorganic acid or salt thereof and an organic acid, wherein the organic acid has a first acid dissociation constant (PKa1) and a second acid dissociation constant (PKa2). PKa1 is less than PKa2, and PKa1 is from about 1 to about 3, and PKa2 is from about 4 to about 7.