METHODS OF MANUFACTURING SEMICONDUCTOR DEVICES

    公开(公告)号:US20200227315A1

    公开(公告)日:2020-07-16

    申请号:US16564688

    申请日:2019-09-09

    Abstract: A method of manufacturing a semiconductor device includes forming a first pattern structure having a first opening and a second pattern structure having a second opening on a substrate, forming a gap fill layer in the second opening, forming fences and contact structures in the first opening, removing the gap fill layer in the second opening, forming an upper conductive layer to cover the first and second pattern structures, the fences, and the contact structures, forming a mask pattern based on a photolithography process using the second pattern structure covered by the upper conductive layer as an align mark, and etching the upper conductive layer using the mask pattern to form upper conductive patterns. A width of the second opening is larger than a width of a first opening. A thickness of the upper conductive layer is smaller than a depth of the second opening.

    METHODS OF MANUFACTURING SEMICONDUCTOR DEVICES

    公开(公告)号:US20210242215A1

    公开(公告)日:2021-08-05

    申请号:US17237195

    申请日:2021-04-22

    Abstract: A method of manufacturing a semiconductor device includes forming a first pattern structure having a first opening and a second pattern structure having a second opening on a substrate, forming a gap fill layer in the second opening, forming fences and contact structures in the first opening, removing the gap fill layer in the second opening, forming an upper conductive layer to cover the first and second pattern structures, the fences, and the contact structures, forming a mask pattern based on a photolithography process using the second pattern structure covered by the upper conductive layer as an align mark, and etching the upper conductive layer using the mask pattern to form upper conductive patterns. A width of the second opening is larger than a width of a first opening. A thickness of the upper conductive layer is smaller than a depth of the second opening.

    SYSTEM FOR MANUFACTURING POWER SUPPLY UNIT AND METHOD FOR MANUFACTURING SUPPLY UNIT, AND FLICKER MEASUREMENT APPARATUS
    3.
    发明申请
    SYSTEM FOR MANUFACTURING POWER SUPPLY UNIT AND METHOD FOR MANUFACTURING SUPPLY UNIT, AND FLICKER MEASUREMENT APPARATUS 有权
    制造电源装置的系统和制造供应单元的方法和闪光测量装置

    公开(公告)号:US20140049187A1

    公开(公告)日:2014-02-20

    申请号:US14056912

    申请日:2013-10-17

    Abstract: A method of manufacturing a power supply unit (PSU) is provided. The method includes providing at least one PSU supplying a dimming signal to at least one light source, performing a first test for electrical characteristics of the at least one PSU, detecting light emitted from the at least one light source, measuring a flicker of the at least one light source, and performing a second test for a state of the at least one PSU based on a flicker measurement result, and packing a PSU determined to be in a normal state among the at least one PSU, as a result of the first test and the second test.

    Abstract translation: 提供一种制造电源单元(PSU)的方法。 该方法包括:向至少一个光源提供至少一个提供调光信号的PSU,对所述至少一个PSU的电特性执行第一测试,检测从所述至少一个光源发射的光,测量所述至少一个光源的闪烁 至少一个光源,并且基于闪烁测量结果对所述至少一个PSU的状态执行第二测试,并且将所述至少一个PSU中确定为处于正常状态的PSU进行打包,作为所述第一 测试和第二次测试。

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