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公开(公告)号:US09386708B2
公开(公告)日:2016-07-05
申请号:US13861754
申请日:2013-04-12
Applicant: Samsung Electronics Co., Ltd.
Inventor: Joong-hyuk Kim , Yong-wan Jin , Young-ki Hong , Sung-gyu Kang , Seung-ho Lee , Jin-seok Hong
CPC classification number: H05K3/1258 , C23C22/78 , C23C22/83 , H05K3/1208 , H05K3/125 , H05K2201/09036
Abstract: Disclosed is a method of forming an electric wiring using inkjet printing. The method includes forming a main trench and first and second guide trenches on a substrate. The first and second guide trenches are disposed at opposite sides of the main trench. The method includes ejecting ink into the main trench, the ink including a conductive material. The method also includes heating the substrate to sinter the ink such that the electric wiring is formed an upper portion of the main trench, and contract the ink such that a tunnel is formed in a lower portion of the main trench.
Abstract translation: 公开了使用喷墨印刷形成电布线的方法。 该方法包括在衬底上形成主沟槽和第一和第二引导沟槽。 第一和第二引导沟槽设置在主沟槽的相对侧。 该方法包括将油墨喷射到主沟槽中,该油墨包括导电材料。 该方法还包括加热基底以烧结墨,使得电布线形成主沟槽的上部,并收缩墨,使得在主沟槽的下部形成隧道。