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公开(公告)号:US20240023336A1
公开(公告)日:2024-01-18
申请号:US18212323
申请日:2023-06-21
Applicant: Samsung Electronics Co., Ltd.
Inventor: Kangmin Kim , Seungje Oh , Joohang Lee
CPC classification number: H10B43/35 , H10B41/27 , H10B41/35 , H10B43/27 , H10B80/00 , H01L25/0657 , H01L25/18 , H01L24/08 , H01L2224/08145 , H01L2924/1431 , H01L2924/14511
Abstract: The present disclosure provides for apparatuses and systems including integrated circuit devices. In some embodiments, an integrated circuit device includes a semiconductor substrate including a memory cell area and a connection area, a gate stack including a plurality of word line gate layers and a plurality of insulating layers and having a step structure in the connection area, a word line cut region passing through the plurality of word line gate layers in the memory cell area and the connection area and extending in a third direction, a plurality of first channel structures disposed on the memory cell area, a string select line gate layer disposed on the gate stack in the memory cell area, a plurality of second channel structures passing through the string select line gate layer, and a string select line cut region passing through the string select line gate layer.