Abstract:
A photoresist supplying system includes a pump that includes a first tube phragm that stores a photoresist and a filter that filters the photoresist, a second tube phragm that stores the photoresist and is disposed outside the pump, where the second tube phragm transfers the photoresist to the first tube phragm, a storage unit that stores the photoresist, where the storage unit provides the photoresist to the second tube phragm, and a tube phragm drive unit that is connected to the first tube phragm. The tube phragm drive unit adjusts an interior volume of the first tube phragm and applies a pressure to a flexible outer wall of the first tube phragm to transfer the photoresist from the first tube phragm to a nozzle installed in the chamber. At least a part of the photoresist stored in the first tube phragm is transferred to the second tube phragm.
Abstract:
A photoresist supplying system includes a pump that includes a first tube phragm that stores a photoresist and a filter that filters the photoresist, a second tube phragm that stores the photoresist and is disposed outside the pump, where the second tube phragm transfers the photoresist to the first tube phragm, a storage unit that stores the photoresist, where the storage unit provides the photoresist to the second tube phragm, and a tube phragm drive unit that is connected to the first tube phragm. The tube phragm drive unit adjusts an interior volume of the first tube phragm and applies a pressure to a flexible outer wall of the first tube phragm to transfer the photoresist from the first tube phragm to a nozzle installed in the chamber. At least a part of the photoresist stored in the first tube phragm is transferred to the second tube phragm.
Abstract:
An RF coil has an improved structure to prevent an excessive heat from being transferred to an object, and a magnetic resonance imaging apparatus includes the same. The MRI apparatus includes an RF coil configured to receive an RF signal, wherein the RF coil may include a first cover configured to allow thermal insulation material to be injected into the inside thereof, a second cover configured to allow thermal insulation material to be injected into the inside thereof and detachably coupled to the first cover to form an inner space with the first cover, and at least one circuit board disposed in the inner space and on which a circuit element configured to receive the RF signal is mounted.
Abstract:
Disclosed herein are a RF resonator, a RF coil, and a magnetic resonance imaging (MRI) apparatus. The RF resonator includes a dielectric substance which is provided, on one surface thereof, with an electric conductor, and at least one conductor line which is installed on another surface of the dielectric substance so as to face the electric conductor and provided with a plurality of open-cut portions which are disposed in a plurality of rows.
Abstract:
A phased array RF coil module and an imaging apparatus using the same can receive a magnetic resonance signal generated from a target object at high receive sensitivity and improve a signal to noise ratio. The phased array RF coil module includes at least one first phased array RF coil unit generating a magnetic field having a component horizontal with the surface of a target object and a second phased array RF coil unit formed horizontally with the surface of the target object and generating a magnetic field having a component vertical to the surface of the target object. The imaging apparatus using the phased array RF coil module is a magnetic resonance imaging apparatus.
Abstract:
An RF coil has an improved structure to prevent an excessive heat from being transferred to an object, and a magnetic resonance imaging apparatus includes the same. The MRI apparatus includes an RF coil configured to receive an RF signal, wherein the RF coil may include a first cover configured to allow thermal insulation material to be injected into the inside thereof, a second cover configured to allow thermal insulation material to be injected into the inside thereof and detachably coupled to the first cover to form an inner space with the first cover, and at least one circuit board disposed in the inner space and on which a circuit element configured to receive the RF signal is mounted.
Abstract:
A coil assembly and a magnetic resonance imaging (MRI) apparatus including the same are disclosed. After completion of inspection or repair of the coil assembly, the coil assembly is easily coupled to the Mill apparatus. The coil assembly is configured to interact with a magnetic field generated from a MM apparatus and includes a first case configured to be bendable, a second case configured to be bendable and detachably coupled to the first case, and a printed circuit board substrate disposed between the first case and the second case.