SYSTEM FOR SUPPLYING PHOTORESIST AND METHOD FOR FABRICATING SEMICONDUCTOR DEVICE USING THE SAME

    公开(公告)号:US20230115351A1

    公开(公告)日:2023-04-13

    申请号:US17804732

    申请日:2022-05-31

    Abstract: A photoresist supplying system includes a pump that includes a first tube phragm that stores a photoresist and a filter that filters the photoresist, a second tube phragm that stores the photoresist and is disposed outside the pump, where the second tube phragm transfers the photoresist to the first tube phragm, a storage unit that stores the photoresist, where the storage unit provides the photoresist to the second tube phragm, and a tube phragm drive unit that is connected to the first tube phragm. The tube phragm drive unit adjusts an interior volume of the first tube phragm and applies a pressure to a flexible outer wall of the first tube phragm to transfer the photoresist from the first tube phragm to a nozzle installed in the chamber. At least a part of the photoresist stored in the first tube phragm is transferred to the second tube phragm.

    System for supplying photoresist and method for fabricating semiconductor device using the same

    公开(公告)号:US11733616B2

    公开(公告)日:2023-08-22

    申请号:US17804732

    申请日:2022-05-31

    CPC classification number: G03F7/70908

    Abstract: A photoresist supplying system includes a pump that includes a first tube phragm that stores a photoresist and a filter that filters the photoresist, a second tube phragm that stores the photoresist and is disposed outside the pump, where the second tube phragm transfers the photoresist to the first tube phragm, a storage unit that stores the photoresist, where the storage unit provides the photoresist to the second tube phragm, and a tube phragm drive unit that is connected to the first tube phragm. The tube phragm drive unit adjusts an interior volume of the first tube phragm and applies a pressure to a flexible outer wall of the first tube phragm to transfer the photoresist from the first tube phragm to a nozzle installed in the chamber. At least a part of the photoresist stored in the first tube phragm is transferred to the second tube phragm.

    Insulated RF coil and magnetic resonance imaging apparatus including the same

    公开(公告)号:US10215817B2

    公开(公告)日:2019-02-26

    申请号:US15042485

    申请日:2016-02-12

    Abstract: An RF coil has an improved structure to prevent an excessive heat from being transferred to an object, and a magnetic resonance imaging apparatus includes the same. The MRI apparatus includes an RF coil configured to receive an RF signal, wherein the RF coil may include a first cover configured to allow thermal insulation material to be injected into the inside thereof, a second cover configured to allow thermal insulation material to be injected into the inside thereof and detachably coupled to the first cover to form an inner space with the first cover, and at least one circuit board disposed in the inner space and on which a circuit element configured to receive the RF signal is mounted.

    RF COIL AND MAGNETIC RESONANCE IMAGING APPARATUS INCLUDING THE SAME
    6.
    发明申请
    RF COIL AND MAGNETIC RESONANCE IMAGING APPARATUS INCLUDING THE SAME 审中-公开
    RF线圈和磁共振成像装置,包括它们

    公开(公告)号:US20170074955A1

    公开(公告)日:2017-03-16

    申请号:US15042485

    申请日:2016-02-12

    CPC classification number: G01R33/34015 G01R33/34007 G01R33/3415

    Abstract: An RF coil has an improved structure to prevent an excessive heat from being transferred to an object, and a magnetic resonance imaging apparatus includes the same. The MRI apparatus includes an RF coil configured to receive an RF signal, wherein the RF coil may include a first cover configured to allow thermal insulation material to be injected into the inside thereof, a second cover configured to allow thermal insulation material to be injected into the inside thereof and detachably coupled to the first cover to form an inner space with the first cover, and at least one circuit board disposed in the inner space and on which a circuit element configured to receive the RF signal is mounted.

    Abstract translation: RF线圈具有改进的结构,以防止过多的热被传送到物体,并且磁共振成像设备包括该RF线圈。 MRI装置包括被配置为接收RF信号的RF线圈,其中RF线圈可以包括构造成允许将绝热材料注入其内部的第一盖,构造成允许将绝热材料注入的第二盖 其内部并且可拆卸地联接到第一盖以形成具有第一盖的内部空间,以及布置在内部空间中并且被配置为接收RF信号的电路元件的至少一个电路板。

    COIL ASSEMBLY AND MAGNETIC RESONANCE IMAGING APPARATUS INCLUDING THE SAME
    7.
    发明申请
    COIL ASSEMBLY AND MAGNETIC RESONANCE IMAGING APPARATUS INCLUDING THE SAME 审中-公开
    线圈组装和磁共振成像装置,包括它们

    公开(公告)号:US20170067973A1

    公开(公告)日:2017-03-09

    申请号:US15256549

    申请日:2016-09-03

    Abstract: A coil assembly and a magnetic resonance imaging (MRI) apparatus including the same are disclosed. After completion of inspection or repair of the coil assembly, the coil assembly is easily coupled to the Mill apparatus. The coil assembly is configured to interact with a magnetic field generated from a MM apparatus and includes a first case configured to be bendable, a second case configured to be bendable and detachably coupled to the first case, and a printed circuit board substrate disposed between the first case and the second case.

    Abstract translation: 公开了包括其的线圈组件和磁共振成像(MRI)装置。 在完成线圈组件的检查或修理之后,线圈组件容易地连接到铣床设备。 线圈组件被配置为与由MM设备产生的磁场相互作用并且包括被配置为可弯曲的第一壳体,被配置为可弯曲和可拆卸地联接到第一壳体的第二壳体,以及布置在第二壳体之间的印刷电路板基板 第一种情况和第二种情况。

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