FASTENING AUTOMATION APPARATUS FOR UPPER ELECTRODE

    公开(公告)号:US20220068609A1

    公开(公告)日:2022-03-03

    申请号:US17213017

    申请日:2021-03-25

    Abstract: A fastening automation apparatus for an upper electrode of an etching facility includes a ring, and a plurality of fastening modules movably secured to the ring and configured to be movable in a radial direction on the ring. Each fastening module includes a first frame that is movable in a radial direction on the ring, a driving source installed below the first frame, a driving shaft that transmits a driving force from the driving source, a power transmission unit connected to the driving shaft, and a fastening bit connected to the power transmission unit and configured to be rotated. The plurality of fastening modules are configured to operate simultaneously to install the upper electrode in the etching facility.

    ELECTRONIC APPARATUS FOR APPLYING PERSONALIZED ARTIFICIAL INTELLIGENCE MODEL TO ANOTHER MODEL

    公开(公告)号:US20210065000A1

    公开(公告)日:2021-03-04

    申请号:US17006120

    申请日:2020-08-28

    Abstract: An electronic apparatus includes at least one memory configured to store at least one instruction and a first neural network model; a communicator comprising communication circuitry; and at least one processor configured to execute the at least one instruction to: receive, from an external electronic device, information on a second neural network model stored in the external electronic device through the communicator; compare the first neural network model with the second neural network model based on the information on the second neural network model; and control the communicator to transmit, to the external electronic device, information on a weight between nodes of the first neural network model based on comparison between the second neural network model and the first neural network model.

    Fastening automation apparatus for upper electrode

    公开(公告)号:US12119210B2

    公开(公告)日:2024-10-15

    申请号:US17213017

    申请日:2021-03-25

    CPC classification number: H01J37/32532 H01J37/32642

    Abstract: A fastening automation apparatus for an upper electrode of an etching facility includes a ring, and a plurality of fastening modules movably secured to the ring and configured to be movable in a radial direction on the ring. Each fastening module includes a first frame that is movable in a radial direction on the ring, a driving source installed below the first frame, a driving shaft that transmits a driving force from the driving source, a power transmission unit connected to the driving shaft, and a fastening bit connected to the power transmission unit and configured to be rotated. The plurality of fastening modules are configured to operate simultaneously to install the upper electrode in the etching facility.

    Electronic device and method for controlling the electronic device

    公开(公告)号:US11651621B2

    公开(公告)日:2023-05-16

    申请号:US17035986

    申请日:2020-09-29

    CPC classification number: G06V40/168 G06F9/451 G06F18/231 G06V40/172

    Abstract: The electronic device includes a camera, a non-volatile memory storing at least one instruction and a plurality of object recognition models, a volatile memory, and a processor, connected to the non-volatile memory, the volatile memory, and the camera, and configured to control the electronic device. The processor, by executing the at least one instruction, is configured to, based on an operation mode of the electronic device, load, to the volatile memory, a hierarchical object recognition model having a hierarchical structure corresponding to the operation mode, the hierarchical object recognition model including objection recognition models among the plurality of object recognition models, obtain information on an object by inputting an object image obtained through the camera to the hierarchical object recognition model, and determine an operation of the electronic device based on the information on the object.

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