公开(公告)号：US20210146476A1

公开(公告)日：2021-05-20

申请号：US16906410

申请日：2020-06-19

Applicant: Samsung Electronics Co., Ltd.

Inventor： Youngchul KWON ,  Changhyun KIM ,  Byoungho LEE ,  Jangwoon SUNG ,  Junhyeok JANG ,  Chulsoo CHOI ,  Manhee HAN

IPC: B23K26/06 ,  B23K26/073

Abstract: A stealth dicing apparatus may include a laser light source, and a linearly focusing lens configured to linearly focus a beam output from the laser light source. The linearly focusing lens includes a horizontal surface, and an inclined surface forming an inclination angle with the horizontal surface. The inclination angle satisfies an expression 34.97R2−146.6R+162.5