Semiconductor devices
    6.
    发明授权

    公开(公告)号:US09711523B2

    公开(公告)日:2017-07-18

    申请号:US14574456

    申请日:2014-12-18

    CPC classification number: H01L27/11582

    Abstract: Provided is a semiconductor device, including gate structures on a substrate, the gate structures extending parallel to a first direction and being spaced apart from each other by a separation trench interposed therebetween, each of the gate structures including insulating patterns stacked on the substrate and a gate electrode interposed therebetween; vertical pillars connected to the substrate through the gate structures; an insulating spacer in the separation trench covering a sidewall of each of the gate structures; and a diffusion barrier structure between the gate electrode and the insulating spacer.

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