公开(公告)号：US20170107317A1

公开(公告)日：2017-04-20

申请号：US15225201

申请日：2016-08-01

Applicant: Samsung Electronics Co., Ltd.

Inventor： SEUNGCHUL KWON ,  Jeongju PARK ,  Shi-yong YI ,  Eun Sung KIM ,  Kyeongmi LEE ,  Joona BANG ,  Sanghoon WOO

IPC: C08F293/00 ,  H01L21/027

CPC classification number: C08F293/005 ,  B82Y40/00 ,  C08F12/20 ,  C08F2438/03 ,  G03F7/0002 ,  H01L21/0271

Abstract: A block copolymer includes a first polymer block and a second polymer block having different structures, and one of the first polymer block and the second polymer block has a halogen-substituted structure.