公开(公告)号：US12025652B2

公开(公告)日：2024-07-02

申请号：US17853079

申请日：2022-06-29

Applicant: Samsung Electronics Co., Ltd.

Inventor： Mi-Sol Youn ,  Min Kim ,  Kyoung Woon Min

IPC: G01R31/28

CPC classification number: G01R31/2817 ,  G01R31/2889

Abstract: An apparatus and a method for inspecting a semiconductor includes a water tank which includes a housing, an interior of which is filled with a liquid, and a support block which provides a settling surface for an inspection object inside the housing. A plurality of signal generators are installed on a bottom surface of the housing, and output a frequency signal in a direction in which the inspection object is located. A power supply operates the signal generators. A probe is placed above the inspection object, and a receiver which operates with the probe and is attached to a bottom surface of the support block. Foreign matter remaining on the inspection object are removed, using a plurality of frequency signals which are output by the plurality of signal generating units.