公开(公告)号：US20180340894A1

公开(公告)日：2018-11-29

申请号：US15795592

申请日：2017-10-27

Applicant: Samsung Electronics Co., Ltd.

Inventor： Min-Ho RIM ,  Jung-Soo KIM ,  Young-Hoon SOHN ,  Yu-Sin YANG ,  Chung-Sam JUN ,  Yun-Jung JEE

IPC: G01N21/88 ,  G02B27/09 ,  H01L21/66 ,  H01L21/28 ,  H01L27/11582 ,  H01L27/11556 ,  G06T7/00 ,  G01N21/95

Abstract: An optical measuring method includes generating a Bessel beam, filtering the Bessel beam to generate a focused Bessel beam, vertically irradiating the focused Bessel beam onto a substrate in which an opening is formed, and detecting light reflected from the substrate to obtain an image of a bottom surface of the opening.