公开(公告)号：US20250153122A1

公开(公告)日：2025-05-15

申请号：US18741245

申请日：2024-06-12

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： SUNGHYUN PARK ,  Minsuk KANG ,  Young-Hoo KIM ,  Jinseon YOU ,  Tae-Hong KIM ,  Woogwan SHIM

IPC: B01F35/221 ,  B01F35/21 ,  B01F35/90 ,  B01F35/92 ,  B01F101/58 ,  H01L21/67

Abstract: A chemical liquid exchange method includes: recovering, by a first recycling tank, a first portion of a first chemical liquid that was previously used in a chamber; recovering, by a second recycling tank, a second portion of the first chemical liquid that was previously used in the chamber; supplying, from the first recycling tank, the first portion of the first chemical liquid to a first sub-tank; draining, from the second recycling tank, the second portion of the first chemical liquid; supplying, from the first sub-tank, the first portion of the first chemical liquid to a main tank; and receiving, by a second sub-tank, a second chemical liquid from an outside; and supplying, from the second sub-tank, the second chemical liquid to the main tank.

公开(公告)号：US20210330146A1

公开(公告)日：2021-10-28

申请号：US17241229

申请日：2021-04-27

Applicant: Samsung Electronics Co., Ltd.

Inventor： Taesang PARK ,  Minsuk KANG ,  Dongsuk KO

IPC: A47L5/22 ,  A47L9/22

Abstract: A motor assembly is disclosed. The motor assembly includes a motor having an axis, an impeller having a plurality of wings and configured to connect with the axis, and an impeller cover configured to cover a side surface of the impeller and disposed spaced apart from the impeller by a pre-set distance, and at least one from among the plurality of wings includes a protrusion disposed between the impeller cover and the wing.