公开(公告)号：US20220350240A1

公开(公告)日：2022-11-03

申请号：US17712161

申请日：2022-04-03

Applicant: Samsung Electronics Co., Ltd.

Inventor： Mun Ja Kim ,  Ji-Beom Yoo ,  Qicheng Hu ,  Changyoung Jeong ,  Ki-Bong Nam ,  Jin-Ho Yeo

IPC: G03F1/64 ,  C23C16/26 ,  C23C16/02 ,  C23C16/50

Abstract: A method for manufacturing a pellicle according to the technical idea of the present invention includes preparing a support substrate, forming a catalyst layer including nickel (Ni) in which one selected from a (110) plane and a (100) plane is a dominant crystal plane, on the support substrate, and performing a chemical vapor deposition process on the catalyst layer at about 1050° C. or less to form a membrane having a graphite layer.